大角度激光通信带通滤光片的研究  

Research on Band-pass Filter with Large Angle for Laser Communication

作　　者：黄宏 孙英杰 孙兵[1] HUANG Hong;SUN Ying-jie;SUN Bing(Academy of Opto-Electronics,China Electronics Technology Group Corporation(AOE CETC),Tianjin 300308,China)

机构地区：[1]中国电子科技集团公司光电研究院

出　　处：《光电技术应用》2020年第1期35-38,50,共5页Electro-Optic Technology Application

摘　　要：为了满足激光通信系统的技术需求,选取Ti3O5、SiO2两种材料,采用前、后表面分别镀制长、短波通组合的方法,在HWB850基底上完成了在0°~60°范围内1064nm波段高透射,紫外、可见、近红外波段深截止滤光膜的设计,分析了实际测试曲线与理论曲线不吻合原因,并结合工艺的改进解决了偏差,最终制备的滤光片在0°入射时1064nm透过率91.7%,截止带透过率小于0.1%,60°入射时1064nm透过率86.9%,截止带透过率小于1%,具有良好的环境适应性,满足系统的技术需求。With the rapid development of science and technology,higher requirements are put forward for la⁃ser communication system.In order to meet the technical requirements of laser communication system,Ti3O5 and SiO2 are selected,and the design of 1064 nm high transmission,ultraviolet,visible and near infrared band deep cut-off filter film in the range of 0~60°is completed on the HWB850 substrate by using the method of combination of front and back surface long and short wave pass.The reasons for the inconsistency between the test curve and the theoretical curve are analyzed,and combined with the improvement of technology to solve the problem.The final fil⁃ter has 91.7%transmittance at 1064 nm,less than 0.1%at cut-off band,86.9%at 1064 nm at 60°and less than 1%at cut-off band.It has good environmental adaptability and meets the technical requirements of the system.

关 键 词：光学薄膜 滤光片 沉积 激光通信 

分 类 号：O484[理学—固体物理]