MgO/Pd底层对CoSiB/Pd多层膜垂直磁各向异性及热稳定性的影响  

Effect of MgO/Pd underlayer on perpendicular magnetic anisotropy and thermal stability of CoSiB/Pd multilayers

作　　者：赵泽军 卢学鹏 刘帅[1] 息剑峰 李宝河[1] ZHAO Ze-jun;LU Xue-peng;LIU Shuai;XI Jian-feng;LI Bao-he(School of Science,Beijing Technology and Business University,Beijing 102488,China)

机构地区：[1]北京工商大学理学院

出　　处：《材料工程》2020年第2期65-70,共6页Journal of Materials Engineering

基　　金：北京市教育委员会2018科技计划重点项目(KZ201810011013);北京工商大学科研团队建设项目(19005902016);2019年研究生科研能力提升计划项目(19008001616)

摘　　要：采用磁控溅射方法在玻璃基片上制备以MgO/Pd为底层的CoSiB/Pd多层膜样品,研究MgO底层厚度t对CoSiB/Pd多层膜垂直磁各向异性(perpendicular magnetic anisotropy,PMA)的影响,分析具有MgO/Pd底层的多层膜的热稳定性。通过对样品的反常霍尔效应的测试分析发现,底层中引入MgO层能够提高其PMA性能,当t为3.5 nm时,样品的矩形度最好。对最佳样品MgO(3.5 nm)/Pd(3 nm)/[CoSiB(0.5 nm)/Pd(0.8 nm)]2/Ta(2 nm)的磁滞回线进行测试,其有效磁各向异性常数K eff达到2.0×10^5 J/m^3。热稳定性分析发现,当退火温度为200℃时,样品的K eff达到最大值2.6×10^5 J/m^3;当退火温度达到400℃时,样品仍能保持良好的PMA性能。The CoSiB/Pd multilayers with MgO/Pd underlayer were deposited by magnetron sputtering technique on the glass substrate.The effect of MgO underlayer’s thickness t on perpendicular magnetic anisotropy of CoSiB/Pd multilayer was studied,and the thermal stability of multilayers with MgO/Pd underlayer was analyzed.The results show that the performance of PMA of samples improves due to the introduction of the MgO in the bottom layer through the analysis of anomalous Hall effect of samples,when the thickness t of MgO is 3.5 nm,the squareness of the sample is the best.The hysteresis loops of the best sample MgO(3.5 nm)/Pd(3 nm)/[CoSiB(0.5 nm)/Pd(0.8 nm)]2/Ta(2 nm)is tested,and the effective magnetic anisotropy constant(K eff)of the sample reaches 2.0×10^5 J/m 3.The thermal stability analysis shows that the K eff reaches the maximum value 2.6×10^5 J/m^3 at the annealing temperature of 200℃;the sample can still maintain good PMA performance,when the annealing temperature reaches 400℃.

关 键 词：CoSiB/Pd多层膜 反常霍尔效应 垂直磁各向异性 有效磁各向异性常数 

分 类 号：O469[理学—凝聚态物理]