基于二维MEMS器件的微型投影技术  

Micro-projection technology based on 2D MEMS device

作　　者：江伦[1] 宋志化 安岩[1] JIANG Lun;SONG Zhihua;AN Yan(Key Laboratory of Fundamental Science for National Defense of Aero and Ground Laser Communication Technology,Changchun University of Science and Technology,Changchun 130022,China;College of Optoelectronic Engineering,Changchun University of Science and Technology,Changchun 130022,China)

机构地区：[1]长春理工大学空地激光通信技术国防重点学科实验室,吉林长春130022 [2]长春理工大学光电工程学院,吉林长春130022

出　　处：《应用光学》2020年第1期156-162,共7页Journal of Applied Optics

基　　金：国家自然科学基金(61701045);吉林省优秀青年人才基金(20170520163JH);长春理工大学创新基金(2016·[03]);长春市科技发展计划资助项目(18DY016)

摘　　要：利用微机电器件的二维偏转特性,以激光二极管为光源,通过二者结合来实现激光扫描微机电器件的投影系统。和传统微型投影技术相比,基于微机电器件的微型投影显示系统具有尺寸小、能耗低、图像对比度高等优点。根据元器件特性,对激光光束进行准直、汇聚、匀化处理,并借助二维微机电器件的反射偏转特性设计了物镜后扫描系统,再对扫描方法、像素排列等进行优化分析。设计结果显示:系统像面尺寸为104 mm×59 mm,包含80%能量时单像素点几何半径在186μm以内,系统分辨率可以达到558×314 pixel,刷新率为30 Hz。设计的投影系统可用在车载平视显示系统等小型投影系统中,也可为类似设计提供参考。The laser scanning micro electromechanical device projection system is realized by the twodimensional deflection characteristics of micro electromechanical device and the laser diode as the light source.Compared with the traditional micro-projection technology,the micro-projection display system based on the micro electromechanical device has the advantages of small size,low energy consumption and high image contrast.According to the characteristics of the components,the laser beam was collimated,concentrated and homogenized.The post-scanning system of the objective lens was designed by using the reflection deflection characteristics of two-dimensional micro electromechanical device,and the scanning methods as well as the pixel arrangement were optimally analyzed.The design results show that the size of the image plane is 104mm×59mm,and the single-pixel point geometric radius is within 186μm when 80%energy is included.The resolution of the system can reach 558×314 pixel,and the refresh rate is 30Hz.The design results can be used in the small projection systems such as vehicle head-up display system,and can also provide reference for similar designs in the future.

关 键 词：微振镜 激光投影 成像系统 光束整形 车载平显 栅式扫描 

分 类 号：TN27[电子电信—物理电子学]