光栅数显装置的非线性补偿方法研究  

Nonlinear compensation method of grating digital display device

作　　者：李昆[1] 何小妹[1] 何磊[1] 王一璋[1] LI Kun;HE Xiaomei;HE Lei;WANG Yizhang(ChangCheng Institute of Metrology,Measurement,Beijing 100095,China)

机构地区：[1]航空工业北京长城计量测试技术研究所

出　　处：《自动化与仪器仪表》2020年第1期28-31,共4页Automation & Instrumentation

基　　金：国家“十三五”技术基础科研项目(No.JSJL2018205A002)

摘　　要：以提高光栅测量系统的精度为目的,提出一种基于光栅数显装置的非线性补偿方法。采用实时误差分离技术来对光栅测量误差进行修正的,通过采样点建立误差修正的数学模型,根据数学模型实现对任意测量值的误差修正。实验结果表明,该方法可有效解决由光栅本身的制造误差、光电转换部分误差及外界环境的振动、温度变化等因素带来影响光栅测量系统精度的问题,从而可大幅度地提高光栅测量系统的精度,而且这种补偿方法不但算法简单方便且经济成本较低,完全能够满足大部分光栅测量系统对于测量精度的要求。For the purpose of improving the accuracy of the grating measurement system,a nonlinear compensation method based on the grating digital display device is proposed.The real-time error separation technology is used to correct the errors of the grating measurement.The mathematical model of the error correction is established through sampling points,and the error correction of any measurement value is realized according to the mathematical model.The experimental results show that this method can effectively solve the problems that affect the accuracy of the grating measurement system caused by the manufacturing error of the grating itself,the error of the photoelectric conversion part,the vibration of the external environment,the temperature change,and other factors,so that the accurary of raster measurement system can be greatly improved,and the algorithm compensation method is not only simple and convenient and low economic cost,fully able to meet the measurement accuracy requirements of most grating measurement systems.

关 键 词：光栅 误差修正 测量精度 

分 类 号：TP20[自动化与计算机技术—检测技术与自动化装置]