智能时代下的新型柔性压阻传感器  

Novel Flexible Resistive Sensors in the Age of Intelligence

作　　者：骆泽纬 田希悦 范基辰 杨鑫[1] 樊天意 王超伦 吴幸[1] 褚君浩[1] LUO Zewei;TIAN Xiyue;FAN Jichen;YANG Xin;FAN Tianyi;WANG Chaolun;WU Xing;CHU Junhao(Shanghai Key Laboratory of Multidimensional Information Processing,East China Normal University,Shanghai 200241,China)

机构地区：[1]华东师范大学上海市多维度信息处理重点实验室

出　　处：《材料导报》2020年第1期69-79,共11页Materials Reports

基　　金：国家自然科学基金面上项目(61574060);上海市科委项目(19ZR1473800);上海青年科技启明星(17QA1401400);中国科协青年人才托举工程;上海高校特聘教授(东方学者);中央高校基本科研专项基金~~

摘　　要：传感器是能将外部物理激励转换为电信号的核心器件。随着物联网、生物医疗、人工智能等新兴领域的发展,传感器的性能与其适用环境的标准愈来愈高,全球的科学技术研究学者在不断地探索各类新型传感器技术。近年来,具有新材料、新结构、高性能的柔性传感器已被广泛报道,其材料选择、结构控制、制备工艺流程等技术不断完备。其中,柔性压阻传感器的工作原理是将一系列的外加压力信号转换为电信号。性能优异的柔性压阻传感器具有高灵敏度、高线性度、大测量范围、快速响应和高重复性等特点。传感器的微观结构是决定其性能的主要调控因素。传统的传感器表征测试方法只能静态地测量器件的结构,却无法在器件工作状态下实时地、动态地监测材料结构和化学成分的变化对其电学性能的影响。原位表征测量技术的出现可以解决上述问题,为进一步提升传感器性能提供了直观的实验支持。与此同时,单一传感器不能满足信息时代的技术需求,阵列化、智能集成系统成为未来传感器技术发展的主流趋势。智能传感系统不仅具备柔性压阻传感器采集信号的功能,还将传感器与设计的集成电路相连,通过电路对采集到的数据信息进行传输与处理,使用人工智能神经网络算法进行计算,完成数据的智能分析与处理,最终将数据传输到终端显示,展示出人体生理健康信息监测所需要的信息与智能化分析结果。本文主要归纳了近年来柔性压阻传感器的智能化进展,结合原位表征技术阐明了柔性压阻传感器的微观结构与性能的关联机制,探讨了基于柔性压阻传感器的智能系统构筑,最后展望了柔性压阻传感器与多功能智能传感系统未来的发展趋势及研究重点。Sensor is an important device to convert external physical excitation into electrical signals. With the development of Internet of Things,biomedical,artificial intelligence,the requirements of sensor properties are getting stringent. Researchers are constantly developing novel sensors to meet the growing demand. Recently,researchers have actively carried out relevant work on flexible sensors with new materials,new structures and high performance. The technologies such as material selection,structure control and preparation process are continuously developed. The sensing principle of the flexible resistive sensor is to convert the applied pressure signals into electrical signals. The flexible resistive sensor with excellent performance has high sensitivity,high linearity,large working range,fast response and repeatability.The microstructure of the sensor is the main regulator of the property. The traditional sensor characterization method can only measure the structure of the device statically,but it cannot dynamically monitor the change of material structure and chemical composition which influence the electronic property under the working condition in real time. The emergence of in situ characterization technology can solve the problems above and provide intuitive experimental support for improving sensor property. At the same time,a simple sensor cannot meet the technical needs in the age of information. It is no doubt that intelligent integrated and arrayed system is the trend of future sensor technology development. The intelligent sensing system possesses the function of collecting signals by the flexible resistive sensor and connecting the sensor with the designed integrated circuit. After transmitting and processing,the data is processed by artificial intelligence neural network algorithm. The results are transmitted to the intelligent display terminals where users can check the information and data analysis result.In this review,we place particular emphasis on the progress of intelligent flexible resistiv

关 键 词：柔性电子学 压阻传感器 原位表征 智能系统 

分 类 号：TN40[电子电信—微电子学与固体电子学]