PM流量控制器参数对液体静压导轨运动精度影响的研究  

Influence of PM Controller Parameters on Motion Accuracy of Hydrostatic Guideways

作　　者：施晨淳 王振忠[1] 彭云峰[1] 李陈磊 孔刘伟 SHI Chenchun;WANG Zhenzhong;PENG Yunfeng;LI Chenlei;KONG Liuwei(Department of Mechanical and Electrical Engineering,Xiamen University,Xiamen 361005)

机构地区：[1]厦门大学机电工程系

出　　处：《机械工程学报》2020年第1期157-165,共9页Journal of Mechanical Engineering

基　　金：国家科技重大专项资助项目(2017ZX04022001-207)

摘　　要：液体静压导轨在超精密机床中广泛应用,其运动误差直接影响被加工件表面精度,因此,针对液体静压导轨运动精度的研究并不少见。然而,上述研究涉及的建模方法都具有一定的简化处理,并且少有考虑恒压式液体静压导轨中关键元件节流器的影响作用。基于运动学理论,直接建立四油垫闭式液体静压导轨准静态理论模型,研究PM流量控制器参数对运动精度的影响。分析表明,该节流器三个关键参数不影响运动误差曲线波峰波谷的出现位置,但会影响运动误差的波动程度和PV值。通过油膜反力波动分析可以解释运动误差变化机理,油膜反力波动越剧烈,运动误差变化也越显著。相对于其他两个参数比流量Kr和供油压力Ps,初始流量Q0对运动精度的影响较为显著。研究工作旨在为PM流量控制器关键参数的选取提供理论参考。Hydrostatic guideways are widely applied in ultra-precision machine tools,and the motion errors directly affects the surface accuracy of machined workpiece,so there are many researches on the motion accuracy of hydrostatic guideways.However,the models of aforementioned researches almost involve simplification,besides,the influence of the restrictor,which is considered as the key component in hydrostatic guideways,on the motion accuracy is also rarely taken into consideration.Based on kinematical theory,quasi-static theoretical model of closed hydrostatic guideway with four pads is established directly,and the effect of PM controller parameters on motion accuracy of hydrostatic guideways is analyzed.It can be found that,the position of peaks and valleys of motion error curves are not affected by the three key parameters of PM controller,but the fluctuation and PV value of motion errors.The variation mechanism of motion errors can be interpreted by the analysis of oil film reaction forces,the intense the variations of those forces,the more obvious the fluctuations of motion errors.Compared to the flow ratio Kr and the supply pressure Ps,the initial flow Q0 does have the more significant effect on motion accuracy.The research provides some reference value for the design of the hydrostatic guideways based on the PM controller.

关 键 词：液体静压导轨 运动精度 PM流量控制器 运动误差 

分 类 号：TH133[机械工程—机械制造及自动化]