基于实时工业以太网的晶圆清洗设备控制系统设计  

Design of Control System for Wafer Cleaning Equipment Based on Real-Time Industrial Ethernet

作　　者：孙国峰 高建利 郭育澎 杜婷婷 张利军 SUN Guofeng;GAO Jianli;GUO Yupeng;DU Tingting;ZHANG Lijun(The 45th Research Institute of CETC,Beijing 100176,China)

机构地区：[1]中国电子科技集团公司第四十五研究所

出　　处：《电子工业专用设备》2020年第1期63-67,共5页Equipment for Electronic Products Manufacturing

摘　　要：介绍了实时工业以太网的发展历程;对EtherCAT和TwinCAT在硬件拓扑及底层逻辑应用方面进行了分析研究;在硬件上根据接口特性设计了拓扑结构,在软件方面设计了底层逻辑程序模块,并根据底层接口提供了上位机人机界面的设计方法。the development of real-time Ethernet is introduced.EtherCAT and TwinCAT were analyzed in hardware topology and underlying logic application.The topological structure is designed according to the interface characteristics on the hardware,and the underlying logic program module is designed on the software.

关 键 词：以太网 以太网控制自动化技术 控制系统 

分 类 号：TN305[电子电信—物理电子学]