嵌入薄膜传感器悬臂梁三向力测量技术研究  

Research on cantilever beam triaxial force measurement technology embedded in thin film sensor

作　　者：韩燕文 武文革[1] 张云涛 成云平[1] 刘丽娟[1] Han Yanwen;Wu Wenge;Zhang Yuntao;Cheng Yunping;Liu Lijuan(North University of China,030051,Taiyuan,China)

机构地区：[1]中北大学

出　　处：《应用力学学报》2020年第1期411-417,I0029,共8页Chinese Journal of Applied Mechanics

基　　金：国家自然科学基金(51875533)

摘　　要：以薄膜传感器悬臂梁作为等效模型,通过传感器的应变效应对三向力测量技术进行了研究。为提高薄膜传感器的应变输出响应,对悬臂梁上布放薄膜传感器的位置加设弹性结构,研究了三向力测力模型输出电压与传感器所在位置应变的关系;分析了受力位置对测力模型输出响应的影响关系,结合实验验证了其工作原理、测力模型应变输出响应与可控尺寸参数的关系。研究表明:该测力模型可实现三向力测量,各个方向最大测量误差均在9%以内,悬臂梁宽度方向x和高度方向z的交叉干涉误差分别为2.84%和3.37%;当悬臂梁自由端受力位置发生变化时,测力模型输出响应只在梁长度方向y上发生变化。The thin film sensor cantilever beam is used as the equivalent model,and the three-direction force measurement technology is studied by the strain effect of the sensor.In order to improve the strain output response of the thin film sensor,an elastic structure is placed on the position of the film sensor on the cantilever beam,and the relationship between the output voltage of the force measuring model and the strain at the position of the sensor is studied.Influence of the force position on the output response of the force measurement model is analyzed.The relationship between the working principle and the strain output response of the force measurement model and the controllable size parameters is verified by experiments.The research shows that the force measurement model can realize three-way force measurement.The maximum measurement error in each direction is within 9%,and the cross-interference error of the cantilever beam width direction x and the height direction z is 2.84%and 3.37%.It can be concluded that when the position of the cantilever beam free end changes,the output response of the force measuring model changes only in the beam length direction y.

关 键 词：薄膜传感器 弹性结构 悬臂梁 三向力 

分 类 号：O342[理学—固体力学] TB121[理学—力学]