车载抬头显示光学系统塑料元件反射膜的研制  

Synthesis of Reflective Coatings on Polycarbonate Membrane: An Advanced Material of Vehicle Head-Up Display

作　　者：刘冬梅[1] 刘文成 付秀华[1] 张静[1] 岳鹏飞 李爽 Liu Dongmei;Liu Wencheng;Fu Xiuhua;Zhang Jing;Yue Pengfei;Li Shuang(Department of Optics and Electric Engineering,Changchun University of Science and Technology,Changchun 130022,China;Optorun.(Shanghai)CO.,Ltd,Shanghai 200444,China)

机构地区：[1]长春理工大学光电工程学院,长春130022 [2]光驰科技(上海)有限公司,上海200444

出　　处：《真空科学与技术学报》2019年第12期1083-1089,共7页Chinese Journal of Vacuum Science and Technology

基　　金：吉林省重大科技攻关专项(20190302095GX)

摘　　要：为了提高抬头显示系统中投影镜和反射镜的耐环境性和光学性能,以聚碳酸酯(PC)作为基底,采用电子束蒸发技术,使用过渡层和连接层技术以及渐增式离子源工艺,解决了薄膜与基底的附着力问题;利用真空退火,改善了环境测试过程中薄膜的膜裂现象;通过调节最外层SiO2的离子源工艺,改善了水煮测试过程中薄膜因水汽渗透而导致的反射率下降的问题。制备了耐环境性能强的平均反射率大于95%的金属-介质结构的高反射膜。实际样品满足抬头显示系统的要求,并通过了多项环境测试。Herein,we reported the deposition of Al-reflective coatings on surface modified polycarbonate(PC) membrane,for fabrication of projection/reflection mirrors of vehicle head-up display(HUD).First,the Ti3O5-transition and SiO2-conection layers were synthesized on the PC surfaces,modified with(Ar+O2) ion beam sputtering to enhance the interfacial adhesion;second,Al-coatings were grown by ion beam assisted electron beam deposition;third,top SiO2 protection coatings were deposited,and finally,the surface and interfacial properties of the vacuum annealed reflective coatings were characterized in harsh environments,including in boiling water,thick salt fog,and thermal shock tests.Besides,vacuum annealing significantly improved the interfacial adhesion and crack-resistance.The results show that the reflective metal-dielectric coatings,with strong interfacial adhesion and weathering resistance,display an average reflectance of over 95% in 400 nm^700 nm range,and that it satisfies the HUD requirements.

关 键 词：光学薄膜 抬头显示系统 光学塑料 铝反射膜 离子源辅助沉积 

分 类 号：O484[理学—固体物理]