产生大面积均匀面电子源的电子枪设计  

Designof New Electron Gun Capable of Generating Uniform Electron-Beam with Large Width

作　　者：顾运厅[1] 林焱剑 闫保军 刘术林[2,5] 杨玉真 余洋[2,3] 温凯乐[2,5] 王玉漫[2,4] Gu Yunting;Lin Yanjian;Yan Baojun;Liu Shulin;Yang Yuzhen;Yu Yang;Wen Kaile;Wang Yuman(School of Physical Science and Technology,Guangxi University,Nanning 530004,China;State Key Laboratory of Particle Detection and Electronics,Institute of High Energy Physics,Chinese Academy of Sciences,Beijing 100049,China;College of Science,Xi,an University of Technology,Xi'an 710054,China;School of Physics,Nanjing University,Nanjing 2100933 China;University of Chinese Academy of Sciences,Beijing 100049,China)

机构地区：[1]广西大学物理科学与工程技术学院,南宁530004 [2]中国科学院高能物理研究所核探测与核电子学国家重点实验室,北京100049 [3]西安理工大学理学院,西安710054 [4]南京大学物理学院,南京210093 [5]中国科学院大学,北京100049

出　　处：《真空科学与技术学报》2019年第12期1109-1113,共5页Chinese Journal of Vacuum Science and Technology

基　　金：国家自然科学基金资助项目(11535014,11675278);核探测与核电子学国家重点实验室资助项目(SKLPDE-ZZ-201920)

摘　　要：为了满足大尺寸微通道板(MCP)的性能测试和电子清刷除气处理,设计了一种电子枪,可以产生尺寸大、均匀性好、动态范围宽的平面电子源。该电子枪采用功函数较低的钽丝,加工成盘香式结构,通过外加电场,使得出射后打到微通道板输入面上的电子源束流密度可调、均匀性优于90%,12 h内的稳定性优于±0.1μA,动态范围达到7个数量级(10^-12~10^-5 A),可以实现对直径为50 mm的微通道板进行精确测试和严格的电子清刷处理,也可以应用于其它领域。A novel type of electron gun,capable of generating uniform e-beam with a large beam width and a narrow energy spread,was developed for the purposes of degassing by e-beam scrubbing and evaluation of large-sized microchannel plate(MCP) with e-beam.The original work was the tantalum filament in a shape of flat-spiral coil because of its lower work function.The characteristics of the prototyped e-gun were experimentally tested and evaluated.The results show that the e-beam had a uniformity of higher than 90%,a stability of better than ±0.1 μA within a period of 12 h,and a dynamic range up to 7-order of magnitude(10^-12~10^-5 A).In addition,the e-beam,generated by the novel electron gun,was used to rigorously characterize the properties of an MCP,50 mm in diameter and degassed by e-beam scrubbing.

关 键 词：微通道板 电子枪 电子清刷 热电子发射 直流增益测试 

分 类 号：O462.1[理学—电子物理学]