紫外熔石英元件高精度低缺陷控形控性制造技术研究进展  

Advances in shape controllable and property controllable manufacturing technology for ultraviolet fused silica components with high precision and few defects

作　　者：石峰[1,2,3] 舒勇 宋辞 田野 铁贵鹏 薛帅 肖航 Shi Feng;Shu Yong;Song Ci;Tian Ye;Tie Guipeng;Xue Shuai;Xiao Hang(College of Intelligent Science,National University of Defense Technology,Changsha 410073,China;Laboratory of Science and Technology on Integrated Logistics Support,National University of Defense Technology,Changsha 410073,China;Hunan Key Laboratory of Ultra-precision Machining Technology,Changsha 410073,China;Aviation Maintenance NCO Academy,Air Force Engineering University,Xinyang 464000,China)

机构地区：[1]国防科技大学智能科学学院,长沙410073 [2]国防科技大学装备综合保障国防科技重点实验室,长沙410073 [3]湖南省超精密加工技术重点实验室,长沙410073 [4]空军工程大学航空机务士官学校,河南信阳464000

出　　处：《强激光与粒子束》2020年第3期11-17,共7页High Power Laser and Particle Beams

基　　金：国家自然科学基金重点项目(51835013);国家自然科学基金联合基金项目(U1801259);国家自然科学基金面上项目(51675526)

摘　　要：传统的紫外熔石英元件加工方法本身会引入各类制造缺陷,需要后期加工来消除前期加工带来的缺陷,限制了熔石英元件的加工质量和加工效率。针对这些问题,课题组提出了采用磁流变、离子束、保形光顺和流体动压抛光等可控柔体加工技术提升熔石英元件的加工效果,并开展了相关研究。主要介绍了课题组在关键技术上取得的重要进展,包括亚纳米精度表面控形制造技术、纳米精度本征表面控性生成方法、熔石英元件高精度低缺陷组合工艺与设备等一系列关键技术。通过探讨关键技术及其发展现状,为未来紫外熔石英元件高精度低缺陷制造技术的发展提供参考。Various manufacturing defects would be introduced in traditional processing of ultraviolet fused silica components, which need to be eliminated by post-processing technique. Because of the defects, the processing efficiency and surface quality cannot meet the requirements. To solve these problems, the research group proposed controllable compliant techniques including magnetorheological finishing, ion beam figuring, conformal smoothing and hydrodynamic polishing to improve processing effect of fused silica components, and carried out related research.This paper mainly introduces the important progress made by the research group on key technologies, including subnanometer precision surface controlled manufacturing technology, nano-precision intrinsic surface property controlled manufacturing method, high-precision and low-defect combination process, equipment of fused silica component.Discussing key technologies and their development status, it provides references for the development of high precision and few defects manufacturing technology of ultraviolet fused silica components in the future.

关 键 词：熔石英元件 高精度 低缺陷 纳米精度 表面控形制造 本征表面 

分 类 号：TH161[机械工程—机械制造及自动化]