Room temperature non-balanced electric bridge ethanol gas sensor based on a single ZnO microwire  

作　　者：Yun-Zheng Li Qiu-Ju Feng Bo Shi Chong Gao De-Yu Wang Hong-Wei Liang 李昀铮;冯秋菊;石博;高冲;王德煜;梁红伟(School of Physics and Electronic Technology,Liaoning Normal University,Dalian 116029,China;School of Microelectronics,Dalian University of Technology,Dalian 116024,China)

机构地区：[1]School of Physics and Electronic Technology,Liaoning Normal University,Dalian 116029,China [2]School of Microelectronics,Dalian University of Technology,Dalian 116024,China

出　　处：《Chinese Physics B》2020年第1期463-468,共6页中国物理B（英文版）

基　　金：Project supported by the National Natural Science Foundation of China(Grant Nos.61574026 and 11405017);the Liaoning Provincial Natural Science Foundation,China(Grant No.201602453)

摘　　要：In this paper,ultra-long and large-scaled ZnO microwire arrays are grown by the chemical vapor deposition method,and a single ZnO microwire-based non-balanced electric bridge ethanol gas sensor is fabricated.The experimental results show that the gas sensor has good repeatability,high response rate,short response,and recovery time at room temperature(25℃).The response rate of the gas sensor exposed to 90-ppm ethanol is about 93%,with a response time and recovery time are 0.3 s and 0.7 s respectively.As a contrast,the traditional resistive gas sensor of a single ZnO microwire shows very small gas response rate.Therefore,ethanol gas sensor based on non-balanced electric bridge can obviously enhance gas sensing characteristics,which provides a feasible method of developing the high performance ZnO-based gas sensor.In this paper, ultra-long and large-scaled ZnO microwire arrays are grown by the chemical vapor deposition method,and a single ZnO microwire-based non-balanced electric bridge ethanol gas sensor is fabricated. The experimental results show that the gas sensor has good repeatability, high response rate, short response, and recovery time at room temperature(25℃). The response rate of the gas sensor exposed to 90-ppm ethanol is about 93%, with a response time and recovery time are 0.3 s and 0.7 s respectively. As a contrast, the traditional resistive gas sensor of a single ZnO microwire shows very small gas response rate. Therefore, ethanol gas sensor based on non-balanced electric bridge can obviously enhance gas sensing characteristics, which provides a feasible method of developing the high performance ZnO-based gas sensor.

关 键 词：ZnO microwire gas sensor room temperature ETHANOL 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置] O614.241[自动化与计算机技术—控制科学与工程]