中国真空计量2004-2019年发展概况及趋势分析  

A Review of the Developing History and Trend of Chinese Vacuum Metrology Subject in the Past 15 Years (2004-2019)

作　　者：李得天[1] LI Detian(Science and Technology on Vacuum Technology and Physics Laboratory,Lanzhou Institute of Physics,Lanzhou 730000,China)

机构地区：[1]兰州空间技术物理研究所真空技术与物理重点实验室

出　　处：《真空与低温》2020年第1期1-16,共16页Vacuum and Cryogenics

摘　　要：回顾了近15年来中国真空计量学科领域的发展历程及态势。从真空全压力测量与校准、真空分压力测量与校准、气体微流量(真空漏率)测量与校准、正压漏率校准、真空材料放气率测试等方面分析了我国真空计量体系的动态演变,在应用需求及专业自身发展推动下,真空计量不断向极值量、极端环境条件下计量和动态量发展;通过与前沿学科的交叉融合,真空测量新方法、新概念进一步发展。面对国际单位制的重新定义,量子真空计量技术将是未来发展的重点方向及必然趋势。This report reviews the developing history and trend of chinese vacuum metrology subject in the past 15 years.It analyzes the evolution of the chinese vacuum metrology system from below aspects,including measurement and calibration of total pressure,partial pressure,gas micro-flow(leak rate),pressure leak calibration,material outgassing rate measurement etc.Vacuum metrology is developing towards measurement of extreme values,under extreme environment conditions,and dynamic values.Currently,through interdisciplinary cutting-edge researches,new methods and conceptions for vacuum measurement have being further developed.Because of the redefinition of the SI units,quantum vacuum metrology technique has become the focus and inevitable trend.

关 键 词：真空计量 真空全压力 真空分压力 气体微流量 量子标准 

分 类 号：TB771[一般工业技术—真空技术]