真空计动态响应特性实验研究  

An Experimental Study of Dynamic Response Characteristics of Vacuum Gauges

作　　者：习振华[1] 李亚丽 成永军[1] 孙雯君[1] 李得天[1] XI Zhenhua;LI Yali;CHENG Yongjun;SUN Wenjun;LI Detian(Science and Technology on Vacuum Technology and Physics Laboratory,Lanzhou Institute of Physics,Lanzhou 730000,China)

机构地区：[1]兰州空间技术物理研究所真空技术与物理重点实验室

出　　处：《真空与低温》2020年第1期25-30,共6页Vacuum and Cryogenics

基　　金：国家自然科学基金(61501212);甘肃省科技重大专项计划(17ZD2WA001)

摘　　要：在工业应用中,为精确监测生产过程,真空计在极短的时间内(1 s或更短)对压力的快速变化做出响应的能力是至关重要的。采用兰州空间技术物理研究所自主研发的快速动态真空校准装置,研究了四种电容薄膜真空计和一种皮拉尼真空计的动态响应特性。分析了真空计动态真空校准过程中的标准压力建立时间、时间常数和响应时间等参数。并验证了该装置的校准能力。研究结果表明,不同的真空计在毫秒量级上跟踪压力变化的能力有明显差别。研究为真空计实现通常使用条件下的动态真空溯源奠定了基础。In industrial applications,it is critical for vacuum gauges to follow rapid changes of pressure in relatively short time intervals(1 s or less)to precisely monitor production processes.This study reports on the experimental work carried out on a rapid dynamic vacuum calibration apparatus developed by Lanzhou Institute of Physics for dynamic response characteristics for four types of capacitance diaphragm gauges and one type of Pirani sensor.The major parameters of the study include standard pressure establishment time,time constant and response time for vacuum gauges.The results show significant variations in their ability to track pressure changes in the millisecond range.This work demonstrates the capability of the experimental facility,which is a step further towards SI traceable dynamic vacuum calibrations under conditions commonly encountered for sensors used in industry.

关 键 词：真空计量 动态真空校准 响应时间 时间常数 

分 类 号：TB772[一般工业技术—真空技术]