浅析含氟电子气体相关标准现状及发展趋势  

Current Status and Development Trend of Related Standards of Fluorinated Electronic Gases

作　　者：徐娇[1] 张建君[1] 鬲春利[1] 方小青[1] 杜肖宾 史婉君[1] XU Jiao;ZHANG Jianjun;GE Chunli;FANG Xiaoqing;DU Xiaobin;SHI Wanjun(Zhejiang Research Institute of Chemical Industry Co.,Ltd.,Hangzhou 310023,China)

机构地区：[1]浙江省化工研究院有限公司

出　　处：《低温与特气》2020年第1期6-11,共6页Low Temperature and Specialty Gases

摘　　要：首先介绍了含氟电子气体研究现状,然后分析了含氟电子气体相关的标准情况及发展趋势。The research status of fluorinated electronic gases is introduced firstly,then the current status and development trend of related standards of fluorinated electronic gases are analyzed in this article.

关 键 词：含氟电子气体 标准 发展趋势 

分 类 号：TQ117[化学工程—无机化工]