Magnetic field enhanced radio frequency ion source and its application for Si-incorporation diamond-like carbon film preparation  

作　　者：Jiping YIN Qing WANG Xinlong WU Chunyu CHENG Dechun BA Zeng LIN 殷冀平;王庆;吴鑫龙;程春玉;巴德纯;蔺增(School of Mechanical Engineering&Automation,Northeastern University,Shenyang 110819,People's Republic of China;Key Laboratory of Implant Device and Interface Science of Liaoning Province,Northeastern University,Shenyang 110819,People’s Republic of China)

机构地区：[1]School of Mechanical Engineering&Automation,Northeastern University,Shenyang 110819,People's Republic of China [2]Key Laboratory of Implant Device and Interface Science of Liaoning Province,Northeastern University,Shenyang 110819,People’s Republic of China

出　　处：《Plasma Science and Technology》2020年第2期79-86,共8页等离子体科学和技术（英文版）

摘　　要：Various ion sources are key components to prepare functional coatings,such as diamond-like carbon(DLC)films.In this article,we present our trying of surface modification on basis of Si-incorporation diamond-like carbon(Si-DLC)produced by a magnetic field enhanced radio frequency ion source,which is established to get high density plasma with the help of magnetic field.Under proper deposition process,a contact angle of 111°hydrophobic surface was achieved without any surface patterning,where nanostructure SiC grains appeared within the amorphous microstructure.The surface property was influenced by ion flow parameters as well as the resultant surface microstructure.The magnetic field enhanced radio frequency ion source developed in this paper was useful for protective film applications.

关 键 词：magnetic field enhanced radio frequency ion source Si-incorporation diamond-like carbon film MICROSTRUCTURE HYDROPHOBICITY protective film 

分 类 号：TB306[一般工业技术—材料科学与工程] TB383.2