实现低气压射频辉光放电的电极设计及实验研究  

Electrode Design for Low-Pressure RF Glow Discharge and Experimental Study

作　　者：苏永飞 李占贤 张钧尧 SU Yong-fei;LI Zhan-xian;ZHANG Jun-yao(Hebei Industrial Robot Industry Technology Research Institute,North China University of Science and Technology,Tangshan 063210,China;D epartment of Engineering Physics,Tsinghua University,Beijing 100084,China)

机构地区：[1]华北理工大学河北省工业机器人产业技术研究院,河北唐山063210 [2]清华大学工程物理系,北京100084

出　　处：《机械工程与自动化》2020年第1期24-25,28,共3页Mechanical Engineering & Automation

摘　　要：采用容性平行电极板和针管电极相结合的形式实现了超低气压下的射频辉光放电,通过实验探究了10-3 Pa量级下的辉光放电的起辉条件,分析了工作气流量大小的影响,得到了电压和电流的关系、辉光放电形貌变化以及放电的发射光谱,并通过计算得到该条件下的电子密度。The RF glow discharge under ultra-low pressure was realized by the combination of capacitive parallel electrode plate and needle electrode.The Initiation condition of the glow discharge at the order of 10-3 Pa were investigated through experiments,the influence of working gas flow was analyzed,the relationship between voltage and current,the changes in glow discharge morphology,and discharge emission spectrum were obtained,and the electron density under this condition are calculated.

关 键 词：低气压 射频辉光 等离子体 复合型电极 

分 类 号：TP391.7[自动化与计算机技术—计算机应用技术] TN136[自动化与计算机技术—计算机科学与技术]