慢波结构微细内槽电火花加工用工具电极的制作方法及应用  

Fabrication Method and Application of EDM Tool Electrode for Machining Micro Internal Grooves of Slow Wave Structure

作　　者：任连生 杨立光[1,3] 郭妍 伏金娟 REN Liansheng;YANG Liguang;GUO Yan;FU Jinjuan(Beijing Key Laboratory of Electrical Discharge Machining Technology,Beijing 100191,China;Beijing Institute of Electro-Machining,Beijing 100191,China;Beijing Dimeng CNC Technology Co.,Ltd.,Beijing 100191,China)

机构地区：[1]电火花加工技术北京市重点实验室,北京100191 [2]北京市电加工研究所,北京100191 [3]北京迪蒙数控技术有限责任公司,北京100191

出　　处：《航空制造技术》2020年第4期43-47,共5页Aeronautical Manufacturing Technology

基　　金：北京市科技新星计划(z181100006218078)

摘　　要：针对微波真空电子器件中的关键零部件--慢波结构微细内槽的加工难题,提出了一种电火花微细加工内槽的方法;设计制作了片状叠式组合的工具电极,通过这种电极的工艺试验,确定了损耗低、加工稳定可靠的电火花加工参数与条件,实现了对慢波结构微细内槽的加工。结果表明:采用电火花加工工艺方法和所制作工具电极是解决慢波结构微细内槽加工的有效方法之一,所加工零件满足了图纸要求。Aiming at the problem of machining the micro-inner grooves of slow-wave structure, the key component of microwave vacuum electronic devices, a method of micro-electrical discharge machining the micro-inner grooves is proposed in this paper. The tool electrode was designed and fabricated by means of laminar combination. The EDM parameters with low loss and reliable processing were determined through the technological experiment of this electrode, and the machining of micro-inner groove of slow-wave structure was realized. The results show that the EDM technology and the combination tool electrode are one of the effective methods to solve the problem of slow-wave structure microgroove machining, and the workpiece can meet the requirements of the drawing design.

关 键 词：电火花加工(EDM) 慢波结构 微细内槽 工具电极 加工工艺 

分 类 号：TG661[金属学及工艺—金属切削加工及机床]