全玻璃真空集热管镀膜设备的发展  

Development of All-glass Vacuum Heat Collector Coating Equipment

作　　者：陈志涛 CHEN Zhi-tao(Dezhou Jinduo Vacuum Coating Technology Co.,Ltd.Dezhou 253400,China)

机构地区：[1]德州金铎真空镀膜技术有限公司

出　　处：《真空》2020年第1期35-39,共5页Vacuum

摘　　要：本文主要介绍了全玻璃真空集热管镀膜设备的发展历程,重点描述了集热管镀膜设备发展过程中的重大改进,以及镀膜设备提高生产效率和节能降耗的方法,对其他行业镀膜设备的发展和改进有一定的借鉴意义。This paper mainly introduces the development history of all-glass vacuum collector coating equipment,and describes the major improvements in the development process of collector coating equipment,as well as the methods of improving production efficiency and saving energy and reducing consumption of coating equipment.It has certain reference significance for the development and improvement of coating machines in other industries.

关 键 词：渐变集热膜 干涉集热膜 定向溅射靶 弱磁铁 三靶镀膜机 

分 类 号：TB43[一般工业技术]