基于扩散硅压阻压力传感器的压差测量  

Differential Pressure Measurement Based on Diffused Silicon Piezoresistive Pressure Sensor

作　　者：赵松玲 韩昕彤 桑艺珂 Zhao Songling;Han Xintong;Sang Yike(Weifang Engineering Vocational College,Shangong Mechanical and Electrical Engineering College,Weifang,Shandong 262500)

机构地区：[1]潍坊工程职业学院山工机电工程学院

出　　处：《南方农机》2020年第4期244-245,共2页

摘　　要：在力或压力(压强)传感器中,金属电阻应变片精度较高、性能较为稳定,被广泛应用。不过,这类传感器存在灵敏系数小的缺点,为了克服这一缺点,半导体应变片随之出现。用半导体材料制作而成的应变片称为压阻式传感器,其中,扩散硅压阻式压力传感器因具有频率响应高、精度高、灵敏度高、可靠性高等优点而被广泛采用。文章在扩散硅压力传感器具有压阻效应工作原理的基础上,借助扩散硅压阻式压力传感器的实训装置进行气压差的测量。In force or pressure(pressure)sensors,the widely used metal resistance strain gauges have higher accuracy and more stable performance.However,this type of sensor has the disadvantage of small sensitivity coefficient.In order to overcome this shortcoming and lack of improvement,semiconductor strain gauges have emerged.Strain gauges made of semiconductor materials are called piezoresistive sensors,Among them,diffused silicon piezoresistive pressure sensors are widely used because they have the advantages of high frequency response,high accuracy,high sensitivity,and high reliability.Based on the principle of piezoresistive effect of diffused silicon pressure sensors,this article uses the practical training device of diffused silicon piezoresistive pressure sensors to measure the pressure difference.Experimental research shows that the diffusive silicon piezoresistive pressure sensor has the advantages of high accuracy,high sensitivity and high reliability when measuring the pres sure difference of air pressure.

关 键 词：扩散硅压阻压力传感器 压阻效应 差压测量 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]