高能量离子束诊断质谱仪的研制及性能表征  

Development and Performances Characterization of a Linear Mass Spectrometer for Diagnosis of High Energy Ion Beam

作　　者：苏海波 谭国斌 黄正旭 洪义[3] 车欣欣 王攀攀 高伟 周振 SU Hai-bo;TAN Guo-bin;HUANG Zheng-xu;HONG Yi;CHE Xin-xin;WANG Pan-pan;GAO Wei;ZHOU Zhen(Guangzhou Hexin Instrument Co.,LTD,Guangzhou 510530,China;Institute of Mass Spectrometer and Atmospheric Environment,Jinan University,Guangzhou 510632,China;School of Environmental and Chemical Engineering,Shanghai University,Shanghai 200444,China;Kunshan Hexin Mass Spectrometry Technology Co..Ltd..Kunshan 215311,China)

机构地区：[1]广州禾信仪器股份有限公司,广东广州510530 [2]暨南大学质谱仪器与大气环境研究所,广东广州510632 [3]上海大学环境与化学工程学院,上海200444 [4]昆山禾信质谱技术有限公司,江苏昆山215311

出　　处：《质谱学报》2020年第2期153-159,I0006,共8页Journal of Chinese Mass Spectrometry Society

基　　金：金属增材制造在线监测系统(2017YFB1103903)资助。

摘　　要：本研究开发了一台应用于高能量离子束诊断的直线式飞行时间质谱仪,实现了其与高能真空弧放电离子源的联用。该仪器加速电压30 kV,飞行腔有效飞行距离1.5 m,通过短脉冲离子门精确截取,ICCD高速相机优化聚焦,仪器分辨率优于90 FWHM,对放电过程中产生的等离子体可实现不同时间的离子成分分析。将该方法用于真空弧放电离子源放电过程中离子成分的检测,放电2μs时,电离成分以气态离子C+、O+、C2+、O2+为主;放电6μs后,除气体成分外,还可以检测到Fe+、Cu+及其同位素金属离子峰。该仪器能够给出离子源放电产生离子的种类、价态以及相对含量等信息,可实现整个放电过程产生离子成分信息的准确诊断。Vacuum is discharge, which is widely used in material surface modification, semiconductor doping and high-energy physics research in particle accelerator injection, the characteristics of vacuum arc discharge plasma, which are of great significance in practical application. Owing to characteristics of time-of-flight mass spectrometry(TOF), it is fast analysis, wide quality range and suitable for transient process, it has great advantage to availability of the information on the composition and charge distribution of the plasma. In our study,a linear time-of-flight mass spectrometer combined with vacuum arc ion source was developed using for diagnosis of high energy ion beam. The TOF analyzer mainly consisted of ion source, ion gate, lens system and MCP detector, the whole system was aligned coaxially with horizontal axis of the drift tube. Ions generated by vacuum arc discharge and accelerated by 30 kV DC high voltage were selectively passed through the ion-gate and then focused by lens system to reach the MCP detector. The effective distance of free-field flight region was 1.5 m. The mass resolution was higher than 90 FWHM by accurate intercepting of short-duration pulse ion gate,and the ion beam focusing effect was investigated by using ICCD high speed camera to improve sensitivity. The instrument could be used to analyze the ion compositions of plasma generated during discharge in various time. Rapid and accurate detection of plasma generated in the discharge process of vacuum arc discharge ion source was realized. Compositions of ionization in the initial stage of discharge(2 μs) were mainly gaseous ions, such as C+, O+, C2+ and O2+, and in the later stage of discharge(6 μs),metal ion such as Fe+, Cu+ and their isotope peaks could be detected. At the same time, the information such as the species, charged state and relative content of ions produced by vacuum arc ion source discharge could be given, and the accurate diagnosis of the whole discharge process could be realized. Though this instrument was not ye

关 键 词：直线式飞行时间质谱仪 真空弧放电离子源 等离子体 高能离子束诊断 

分 类 号：O657.63[理学—分析化学]