A method for calibrating the confocal volume of a confocal three-dimensional micro-x-ray fluorescence setup  

作　　者：Peng Zhou Xin-Ran Ma Shuang Zhang Tian-Xi Sun Zhi-Guo Liu 周鹏;马欣然;张爽;孙天希;刘志国(College of Nuclear Science and Technology,Beijing Normal University,Beijing 100875,China;Applied Optics Beijing Key Laboratory,Department of Physics,Beijing Normal University,Beijing 100875,China;Beijing Radiation Center,Beijing 100875,China;Department of Physics,Beijing Normal University,Beijing 100875,China)

机构地区：[1]College of Nuclear Science and Technology,Beijing Normal University,Beijing 100875,China [2]Applied Optics Beijing Key Laboratory,Department of Physics,Beijing Normal University,Beijing 100875,China [3]Beijing Radiation Center,Beijing 100875,China [4]Department of Physics,Beijing Normal University,Beijing 100875,China

出　　处：《Chinese Physics B》2020年第2期190-195,共6页中国物理B（英文版）

基　　金：Project supported by the National Natural Science Foundation of China(Grant Nos.11675019 and 11875087).

摘　　要：The measurement of the confocal volume of a confocal three-dimensional micro-x-ray fluorescence(3D-XRF)setup is a key step in the field of confocal 3D-XRF analysis.With the development of x-ray facilities and optical devices,3D-XRF analysis with a micro confocal volume will create a great potential for 2D and 3D microstructural analysis and accurate quantitative analysis.However,the classic measurement method of scanning metal foils of a certain thickness leads to inaccuracy.A method for calibrating the confocal volume is proposed in this paper.The new method is based on the basic content of the textbook,and the theoretical results and the feasibility are given in detail for the 3D-XRF mono-chromatic x-ray condition and the poly-chromatic x-ray condition.We obtain a set of experimental confirmation using the poly-chromatic x-ray tube in the laboratory.It is proved that the sensitivity factor of the 3D-XRF can be directly and accurately obtained in a real calibration process.The measurement of the confocal volume of a confocal three-dimensional micro-x-ray fluorescence(3 D-XRF) setup is a key step in the field of confocal 3 D-XRF analysis.With the development of x-ray facilities and optical devices,3 D-XRF analysis with a micro confocal volume will create a great potential for 2 D and 3 D microstructural analysis and accurate quantitative analysis.However,the classic measurement method of scanning metal foils of a certain thickness leads to inaccuracy.A method for calibrating the confocal volume is proposed in this paper.The new method is based on the basic content of the textbook,and the theoretical results and the feasibility are given in detail for the 3 D-XRF mono-chromatic x-ray condition and the poly-chromatic x-ray condition.We obtain a set of experimental confirmation using the polychromatic x-ray tube in the laboratory.It is proved that the sensitivity factor of the 3 D-XRF can be directly and accurately obtained in a real calibration process.

关 键 词：THREE-DIMENSIONAL micro-x-ray fluorescence(3D-XRF) depth analysis CONFOCAL VOLUME probe calibrating 

分 类 号：O434.1[机械工程—光学工程]