Oxide-aperture-dependent output characteristics of circularly symmetric VCSEL structure  

作　　者：Wen-Yuan Liao Jian Li Chuan-Chuan Li Xiao-Feng Guo Wen-Tao Guo Wei-Hua Liu Yang-Jie Zhang Xin Wei Man-Qing Tan 廖文渊;李健;李川川;郭小峰;郭文涛;刘维华;张杨杰;韦欣;谭满清(State Key Laboratory of Integrated Optoelectronic,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China;College of Materials Science and Opto-Electronic Technology,University of Chinese Academy of Sciences,Beijing 100049,China;Laboratory of Nano-photoelectronics,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China)

机构地区：[1]State Key Laboratory of Integrated Optoelectronic,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China [2]College of Materials Science and Opto-Electronic Technology,University of Chinese Academy of Sciences,Beijing 100049,China [3]Laboratory of Nano-photoelectronics,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China

出　　处：《Chinese Physics B》2020年第2期275-281,共7页中国物理B（英文版）

摘　　要：The influence ot oxidation aperture on the output characteristics ot the circularly symmetric vertical-cavity-surtaceemitting laser(VCSEL) structure is investigated.To do so,VCSELs with different oxide aperture sizes are simulated by the finite-difference time-domain(FDTD) method.The relationships among the field distribution of mode superposition,mode wavelength,output spectra,and far-field divergence with different oxide apertures are obtained.Further,VCSELs respectively with oxide aperture sizes of 2.7 μm,4.4 μm,5.9 μm,7 μm,8 μm,9 μm,and 18.7 μm are fabricated and characterized.The maximum output power increases from 2.4 mW to 5.7 mW with oxide aperture increasing from 5.9 μm to 9 μm.Meanwhile,the wavelength tuning rate decreases from 0.93 nm/mA to 0.375 nm/mA when the oxide aperture increases from 2.7 μm to 9 μm.The thermal resistance decreases from 2.815℃/mW to 1.015℃/mW when the oxide aperture increases from 4.4 μm to 18.7μm.It is demonstrated theoretically and experimentally that the wavelength spacing between adjacent modes increases with the augment of the injection current and the spacing becomes smaller with the oxide aperture increasing.Thus it can be reported that the aperture size can effectively reduce the mode overlaying but at the cost of the power decreasing and the wavelength tuning rate and thermal resistance increasing.The influence of oxidation aperture on the output characteristics of the circularly symmetric vertical-cavity-surface-emitting laser(VCSEL)structure is investigated.To do so,VCSELs with different oxide aperture sizes are simulated by the finite-difference time-domain(FDTD)method.The relationships among the field distribution of mode superposition,mode wavelength,output spectra,and far-field divergence with different oxide apertures are obtained.Further,VCSELs respectively with oxide aperture sizes of 2.7μm,4.4μm,5.9μm,7μm,8μm,9μm,and 18.7μm are fabricated and characterized.The maximum output power increases from 2.4 mW to 5.7 mW with oxide aperture increasing from 5.9μm to 9μm.Meanwhile,the wavelength tuning rate decreases from 0.93 nm/mA to 0.375 nm/mA when the oxide aperture increases from 2.7μm to 9μm.The thermal resistance decreases from 2.815℃/mW to 1.015℃/mW when the oxide aperture increases from 4.4μm to 18.7μm.It is demonstrated theoretically and experimentally that the wavelength spacing between adjacent modes increases with the augment of the injection current and the spacing becomes smaller with the oxide aperture increasing.Thus it can be reported that the aperture size can effectively reduce the mode overlaying but at the cost of the power decreasing and the wavelength tuning rate and thermal resistance increasing.

关 键 词：FINITE-DIFFERENCE time-domain(FDTD) vertical-cavity-surface-emitting laser(VCSEL) OXIDE APERTURE wavelength spacing 

分 类 号：TN248[电子电信—物理电子学]