基于Workbench对硅片切割加工夹具的优化设计  

Optimal Design of Silicon Wafer Cutting Fixture Based on Workbench

作　　者：刘建 吴波[1] LIU Jian;WU Bo(School of Mechanical and Electrical Engineering,Wuhan University of Technology,Hubei Wuhan430070,China)

机构地区：[1]武汉理工大学机电工程学院,湖北武汉430070

出　　处：《机械设计与制造》2020年第3期211-213,219,共4页Machinery Design & Manufacture

基　　金：国家大学生创新训练计划基金资助项目(2012049704010)。

摘　　要：针对硅棒在切割加工过程中加工精度不足、效率低等问题,研发了一款用于硅棒加工的金刚石切割夹具。为了使夹具系统的性能更好,使用Workbench软件对夹具进行了的静力学分析,求解出夹具的应力应变云图;根据夹具的频率方程,得出夹具前20阶自由模态固有频率,将求解结果与其工作频率进行对比分析;通过选择合适的设计变量,对夹具进行轻量化设计,获取夹具的最优结构尺寸。由于夹具在不同工况下所受的载荷不一样,所以结合VB和ANSYS软件设计了夹具工况分析系统,用于夹具的快速分析和优化,可有效提高夹具的设计效率。Aiming at the problem of insufficient machining precision and low efficiency during the cutting process,a diamond cutting fixture for silicon rod was developed. In order to make the performance of the fixture system better,the static and mechanical analysis of the fixture is carried out by using the Workbench software to solve the stress-strain cloud of the fixture.According to the frequency equation of the fixture,the natural frequency of the 20-order free mode of the fixture is obtained,and compared with the working frequency. By selecting the appropriate design variables,the fixture is designed in light weight to obtain the optimal structure size of the fixture.Because the load of the fixture is different under different working conditions,in this paper,the fixture condition analysis system is designed for the rapid analysis and optimization of the fixture,which can effectively improve the design efficiency of the fixture.

关 键 词：硅棒 夹具 工况分析系统 

分 类 号：TH16[机械工程—机械制造及自动化]