不锈钢材料的光纤激光掩膜微细电解复合加工  

Stainless steel fiber laser mask micro electrolytic composite machining

作　　者：佟晗[1] 李小海[1] 王淑铭[1,2] 王冬 TONG Han;LI Xiao-hai;WANG Shu-ming;WANG Dong(School of Mechanical Engineering,Jiamusi University,Jiamusi 154002,China;School of Material Science and Engineering,Jiamusi University,Jiamusi 154002,China)

机构地区：[1]佳木斯大学机械工程学院,黑龙江佳木斯154002 [2]佳木斯大学材料科学与工程学院,黑龙江佳木斯154002

出　　处：《激光与红外》2020年第2期131-135,共5页Laser & Infrared

基　　金：国家自然科学基金项目(No.51375208)资助。

摘　　要：光纤激光掩膜微细电解复合加工是激光表面重熔与微细电解加工的结合,是加工微细型腔的有效方法。根据光纤激光掩膜微细电解复合加工的加工原理,搭建复合加工平台并进行工艺试验。对光纤激光掩膜表层物质进行XRD测量,结合有限元法建立热源模型分析激光加工参数对激光掩膜的影响,对不锈钢表层进行电化学极化曲线测量,最后进行工艺试验对得出的结论进行验证。研究结果表明:激光重熔表面耐腐蚀性较好,在微细电解加工过程中对材料基体起到很好的保护作用,选取适当的激光加工参数能够加工出精细的微型腔结构。Optical fiber laser mask ECM is a combination of laser surface remelting and ECM,which is an effective method to process micro-cavity.According to the principle of fiber laser mask micro-electrolytic composite machining,the composite machining platform was built and the process was tested.XRD measurements were made on the surface material of the optical fiber laser mask.The influence of laser processing parameters on the laser mask was analyzed by combining the finite element modeling heat source model.The electrochemical polarization curves of the stainless steel surface were measured and the results were verified by the process test.The results show that the surface of laser remelting has good corrosion resistance,and plays a good role in protecting the material during the micro-electrochemical machining,and selecting appropriate laser processing parameters can produce fine micro-cavity structure.

关 键 词：激光加工 微细加工 极化曲线 不锈钢 

分 类 号：TG665[金属学及工艺—金属切削加工及机床] TG178