基于大面积TFT和PVDF薄膜的表面形貌无损探测技术  

Nondestructive Detection of Surface Morphology Based on Large-Area TFT and PVDF Films

作　　者：尚飞 胡潇然 张千 刘帅 向勇 SHANG Fei;HU Xiao-ran;ZHANG Qian;LIU Shuai;XIANG Yong(School of Materials and Energy,University of Electronic Science and Technology of China,Chengdu 611731)

机构地区：[1]电子科技大学材料与能源学院,成都611731

出　　处：《电子科技大学学报》2020年第2期287-290,共4页Journal of University of Electronic Science and Technology of China

基　　金：部级基金。

摘　　要：针对物体表面形貌无损探测,提出了一种基于大面积薄膜晶体管(TFT)和聚偏氟乙烯(PVDF)薄膜的表面形貌探测方法,具有大面积、可覆形、便携化和高精度的特点。该方法利用电容传感器原理,将已广泛应用于半导体显示领域的TFT阵列与传感器相结合,可精确定位物体表面微米级缺陷,测量分辨率达到50μm,实现了对物体表面形貌的精准无损探测。Aiming at nondestructive detection of the surface morphology of objects,a method based on largearea thin-film transistor(TFT)arrays and poly(vinglidene)fluoride(PVDF)films was developed,which can cover a large area and different shapes while is also portable and highly accurate.This method applies the TFT array,which has been widely used in the semiconductor display field,to the sensor applications.The sensor combined with TFT arrays utilizes the principle of capacitive sensor to accurately detect the surface topography,which can accurately locate micron-level surface defects with a resolution of 50μm.

关 键 词：聚偏氟乙烯 传感器 表面形貌探测 薄膜晶体管 

分 类 号：TB34[一般工业技术—材料科学与工程]