p+Si/Au热电堆式气体流量传感器一维模型及其应用  

Theoretical and Application of a 1-D Model of p+Si/Au Thermopile-Based Gas Flow Sensor

作　　者：王珊珊 王家畴[1,2] 李昕欣 WANG Shanshan;WANG Jiachou;LI Xinxin(Shanghai Institute of Microsystem and Information Technology,Chinese Academy of Sciences,Shanghai 200050,China;University of Chinese Academy of Sciences,Beijing 100049,China)

机构地区：[1]中国科学院上海微系统与信息技术研究所,上海200050 [2]中国科学院大学,北京100049

出　　处：《传感技术学报》2020年第2期161-166,共6页Chinese Journal of Sensors and Actuators

基　　金：国家自然科学基金项目(61674160,61834007)。

摘　　要：为了优化热电堆式气体流量传感器的结构参数使其灵敏度达到最佳,建立了一个一维数学模型,此模型能够快速反映当器件关键尺寸变化时传感器输出电压的变化,有限元仿真软件结果证实了此一维模型的有效性。并利用此模型对一系列器件关键参数进行仿真分析,结合工艺参数得到了一个最优化的器件尺寸。根据这一尺寸制造了一个p+Si/Au热电堆式气体流量传感器以进一步验证一维模型。测试得到的传感器归一化灵敏度为481 [mV/(m/s)]/W。此参数比之前的工作高出数倍。此外,测试所得的输出电压曲线与一维模型仿真的曲线一致性也较好,进一步证明了这一一维模型的正确性。In order to analyze the response of the thermopile-based gas flow sensor when key design parameters change,a 1-D model of thermopile-based sensor is employed and validated by the FEA(finite-element-analysis)model. With this 1-D model,the key parameters of the sensor can be simulated to optimized the sensitivity. Based on these analyses,a new p+Si/Au thermopile-based flow sensor is designed and fabricated to verify the 1-D model. The sensor shows a normalized sensitivity of 481 [mV/(m/s)]/W which is much bigger than that of previously reported works. Tested results of the sensor have a good agreement with that of the 1-D model,which prove the credibility of the 1-D model.

关 键 词：热电堆式气体流量传感器 1-D数学模型 单面硅微机械加工 p+Si/Au 热电堆 

分 类 号：TP212.1[自动化与计算机技术—检测技术与自动化装置]