用于热阴极的热子绝缘层研究  

Study on Heater Insulation Layer for Thermionic Cathodes

作　　者：邯娇[1] 张连正[1] 任峰 赵庆兰[1] 李云[1] 阴生毅[1] 王小霞[1] HAN Jiao;ZHANG Lian-zheng;REN Feng;ZHAO Qing-lan;LI Yun;YIN Sheng-yi;WANG Xiao-xia(The Institute of Electronics,Chinese Academy of Science,Beijing 100080,China)

机构地区：[1]中国科学院电子学研究所,北京100190

出　　处：《真空电子技术》2020年第1期48-51,62,共5页Vacuum Electronics

基　　金：总装预研基金项目(批准号31512010404-1);国家自然科学基金项目(批准号:61771454).

摘　　要：研究了热子涂层的原材料粒度对热子绝缘层质量的影响,粒度过细或过粗,涂层附着不均匀,烧结后涂层表面开裂、起皮、粗糙、掉粉严重。采用粒度级配的配比方案制备了氧化铝涂层,电镜分析表明,涂层致密,质量得到明显改善;与原有工艺相比,氧化铝涂层抗压能力提高了1倍。The influence of raw material granularity on the quality of coating-heater insulator layer was investigated.Excessive small or large particle size leads to non-uniform coating adhesion.After sintering,the surface of the coating is rough,the layer is cracked and peeled,and the powder is dropped severely.The alumina coating was prepared by aparticle size grading ratio scheme.The scanning electron microscopy analysis showed that the coating made by this method was dense and the quality was improved significantly.Compared with the original process,the alumina coating had twice the pressure resistance.

关 键 词：微波真空电子器件 热阴极 热子 绝缘层 

分 类 号：TN105.1[电子电信—物理电子学]