基于干涉测量的Ф1.3 m非球面反射镜定心  

Centering of Ф1.3m aspheric reflector based on interferometry

作　　者：王聪[1] 陈佳夷[1] 栗孟娟[1] 王海超[1] 李斌[1] Wang Cong;Chen Jiayi;Li Mengjuan;Wang Haichao;Li Bin(Beijing Key Laboratory of Advanced Optical Remote Sensing Technology,Optical Ultraprecise Processing Technology Innovation Centre for Science and Technology Industry of National Defense(Advanced Manufacture),Beijing Institute of Space Mechanics&Electricity,Beijing 100094,China)

机构地区：[1]北京空间机电研究所国防科技工业光学超精密加工技术创新中心(先进制造类)先进光学遥感技术北京市重点实验室,北京100094

出　　处：《红外与激光工程》2020年第1期185-190,共6页Infrared and Laser Engineering

基　　金：国家重点研发计划(2016YFB0500802)。

摘　　要：1.3 m凹椭球面反射镜是某遥感器光学系统的主镜,其定心精度要求苛刻。由于该反射镜口径大、顶点曲率半径长,利用定心仪法进行定心的实现难度大,精度低。通过分析非球面的两种偏心之间的补偿现象,可知激光跟踪仪接触测量定心的精度仅为0.15°。三坐标仪接触测量定心的精度能够达到0.005°,不过其量程受限,且在光学加工时的反复搬运会造成不便。利用Offner零位补偿检验光路进行干涉法定心,干涉法将反射镜偏心转换为检测系统波前的初级像差,同样可以达到0.005°的精度。该检测方法的误差来源主要是干涉仪焦点位置误差,是系统误差,可以通过旋转反射镜进行多次定心测量的方法予以消除。完成了该反射镜的定心,其结果与三坐标仪的测量结果对比,两种偏心的最大偏差仅为0.023 mm和0.002°。实现了大口径凹非球面反射镜的原位定心测量。1.3 m concave ellipsoid reflector is the primary mirror of a remote sensor optical system, and its centering accuracy is demanding. Because the reflector had large aperture and long curvature radius of the vertex, it is difficult to center by centering instrument method, and the accuracy was low. By analyzing the compensating phenomena between the two kinds of off-center of aspheric surface, it could be seen that the accuracy of contact measurement centering by laser tracker was only 0.15°. The accuracy of contact measurement centering by three-coordinate instrument measuring instrument can reach0.005°, but its range was limited, and repeated handling in optical processing will cause inconvenience.The Offner zero compensation test was used to verify the optical path for interference centering. The interference method converts the eccentricity of the mirror into the primary aberration of the detection system wavefront, which can also achieve an accuracy of 0.005 °. The error source of this method was mainly the focus position error of interferometer, which was a systematic error. It could be eliminated by multiple centering measurements with rotating mirrors. The maximum deviation of off-center was only0.023 mm and 0.002°, compared with the results measured by the three-coordinate instrument. The in-situ centering measurement of large aperture concave aspheric mirror was realized.

关 键 词：光学检测 定心 零位检验 激光跟踪仪 

分 类 号：TB96[机械工程—光学工程]