中红外双通道滤波器的研制  

Development of mid-infrared dual-channel filter

作　　者：陈旭 吴智勇 赵新潮 周兴雷 王丁[1] CHEN Xu;WU Zhiyong;ZHAO Xinchao;ZHOU Xinglei;WANG Ding(School of Materials Science and Engineering,University of Shanghai for Science and Technology,Shanghai 200093,China;Mathematics&Science College,Shanghai Normal University,Shanghai 200234,China;Shanghai Energy-Saving Coating Glass Engineering Technology Research Center,Shanghai 200083,China;University of Chinese Academy of Sciences,Beijing 100049,China)

机构地区：[1]上海理工大学材料科学与工程学院,上海200093 [2]上海师范大学数理学院,上海200234 [3]上海节能镀膜玻璃工程技术研究中心,上海200083 [4]中国科学院大学,北京100049

出　　处：《光学仪器》2020年第1期32-39,共8页Optical Instruments

基　　金：国家重点研发计划专项(2017YFC0111400);国家自然科学基金项目(11874376);上海市科学技术委员会项目(18590712600,18DZ2282200);中国科学院青年创新促进会项目。

摘　　要：针对中红外目标探测需求,采用多个截止带拼接的设计方法,结合TFCal膜系设计软件优化各个膜层厚度,得到了中红外双通道滤波器膜系。通过对膜系敏感层的分析,将总膜系分成两个膜系进行镀膜,成功制备出2.7~3.0μm和4.1~4.4μm双通道滤波器。得到的样品在2.7~3.0μm波段平均透过率为73%,在4.1~4.4μm波段平均透过率为81%。该方法提高了膜系设计效率,减少了膜层数和总厚度,可解决膜系过厚带来的开裂和脱膜等问题,节约了镀膜时间和成本。According to the requirements of mid-infrared target detection, the mid-infrared dualchannel filter film system is obtained by using a plurality of cut-off stitching design method and the TFCal film system design software to optimize the thickness of each film layer. Through the analysis of the sensitive layer of the membrane system, the total membrane system was divided into two membrane systems for coating, and two-channel filters of 2.7-3.0 μm and 4.1-4.4 μm were successfully prepared. The obtained sample has an average transmittance of 73% at 2.7-3.0 μm and an average transmittance of 81% at 4.1-4.4 μm. This method improves the design efficiency of the film system, and reduces the total thickness of the film system. Besides, it can solve the problems caused by the excessive thickness of the film and save the cost and time of the coating.

关 键 词：中红外 双通道 滤波器 红外探测 膜系设计 

分 类 号：TN214[电子电信—物理电子学]