晶粒取向及氧化电压对阳极氧化Ta2O5纳米管形貌的影响  

Effects of Grain Orientation and Oxidation Voltage on Morphology of Anodized Ta2O5 Nanotubes

作　　者：张玉 刘施峰[1] 李利娟 祝佳林 邓超[1,2] ZHANG Yu;LIU Shifeng;LI Lijuan;ZHU Jialin;DENG Chao(College of Materials Science and Engineering,Chongqing University,Chongqing 400044,China;Electron Microscopy Center of Chongqing University,Chongqing 400044,China)

机构地区：[1]重庆大学材料科学与工程学院,重庆400044 [2]重庆大学电子显微镜中心,重庆400044

出　　处：《材料导报》2020年第8期10-13,共4页Materials Reports

基　　金：重庆市基础科学与前沿技术研究项目(cstc2017jcyjAX0094);科技部国家重大专项项目(2011ZX02705)。

摘　　要：以(110)和(111)取向单晶钽片为原材料,在体积比为9∶1的浓H2SO4和HF电解液中,保持电压为30 V,阳极氧化1 min制备Ta2O5纳米管。对比在(110)和(111)取向单晶上制备的Ta2O5纳米管的扫描电子显微镜(SEM)图像,研究晶粒取向对阳极氧化Ta2O5纳米管形貌的影响。在相同电解液体系下,将两种不同取向单晶分别在电压为5 V、15 V、25 V、35 V的条件下氧化30 s,研究氧化电压对Ta2O5纳米管形貌的影响。研究结果表明:(111)取向更有利于Ta 2O 5纳米管的生长,其管长约为6.28μm,Ta2O5纳米管的顶部抱团成簇,纳米管外部粗糙似竹节;(110)取向制备的Ta 2O 5纳米管开口好,外管壁光滑,管长约为3.71μm;Ta2O5纳米管的管长及管径与氧化电压呈正相关,且(111)单晶生长的Ta2O5纳米管管长及管径大于(110)单晶生长的纳米管。Ta2O5纳米管的生长具有取向相关性,主要受原子排列密度的影响,原子排列密度越大,其纳米管的生长速率越小,故Ta2O5纳米管管长越短,管径越小。Ta2O5 nanotubes were prepared by single crystals with different orientation,including(110)and(111),anodizing at constant voltage 30 V for 1 min in a concentrated H2SO4/HF solution with a volume ratio of 9∶1.The effect of grain orientations on the morphology of anodized Ta2O5 nanotubes was investigated by comparing the SEM images of Ta2O5 nanotubes grown on single crystals with different grain orientation.At the same electrolyte system,the effect of oxidation potentials on the morphology of Ta2O5 nanotubes was investigated by oxidizing for 30 s under the voltage of 5 V,15 V,25 V,and 35 V,respectively.The results showed that the(111)orientation was more favorable for the growth of Ta2O5 nanotubes,which led to a structure with 6.28μm in thickness with the clustered Ta2O5 nanotubes at top and a rough outside wall,similar to bamboo,however the Ta2O5 nanotubes prepared by(110)orientation had good openings and smooth outer wall,and the tube length was about 3.71μm.The study also found that the tube length and diameter of Ta2O5 nanotubes are positively correlated with the oxidation voltage,moreover the length and diameter of Ta2O5 nanotubes grown by(111)single crystals were better than those of(110)single crystals.Growth rate of Ta2O5 nanotubes was related to grain orientation.The difference in the length and diameter of Ta2O5 nanotubes prepared by different orientation single crystals was mainly due to the atomic planar density,the higher the atomic planar density,the smaller the growth rate of the nanotubes and the shorter the Ta2O5 nanotubes length,the smaller the Ta2O5 nanotubes diameter.

关 键 词：单晶钽片 阳极氧化 晶粒取向 氧化电压 Ta2O5纳米管 

分 类 号：TB34[一般工业技术—材料科学与工程]