有机太阳能电池氧化铟锡电极的结晶性能优化  

Optimization of Crystallization Performance of Indium Tin Oxide Electrode for Organic Solar Cells

作　　者：张智博 郭新涛 杨亚楠[1] 刘滢 张博 杨磊[1] 朱嘉琦[1] ZHANG Zhi-bo;GUO Xin-tao;YANG Ya-nan;LIU Ying;ZHANG Bo;YANG Lei;ZHU Jia-qi(State Key Laboratory of Science and Technology on Advanced Composites in Special Environments, Harbin Institute of Technology, Harbin 150080, China;Department of Materials Research, AVIC Manufacturing Technology Institute, Beijing 100024, China)

机构地区：[1]哈尔滨工业大学特种环境复合材料技术国家级重点实验室,黑龙江哈尔滨150080 [2]中国航空制造技术研究所材料研究部,北京100024

出　　处：《节能技术》2020年第1期3-8,共6页Energy Conservation Technology

基　　金：国家杰出青年科学基金(51625201)。

摘　　要：氧化铟锡(In2O3∶Sn)是有机太阳能电池电极的关键材料,但由于In2O3∶Sn薄膜结晶所需的高温沉积条件,衬底的性能会降低,影响了太阳能电池的光电性能。本文在传统磁控溅射工艺中引入了一种新的等离子体轰击技术,以提高氧化铟锡(In2O3∶Sn)薄膜的室温结晶性能。研究了不同脉冲直流电压下等离子体轰击对In2O3∶Sn薄膜光电性能和机械性能的影响。结果表明,当脉冲直流电压(|Vp|)高于|-500 V|(|Vp|>|-500 V|)时,薄膜的结晶性明显增强。在室温下制备了厚度为135 nm的In2O3∶Sn薄膜,其电阻率为4.11×10^-4Ωcm,迁移率为42.1 cm^2/Vs,可见光透过率超过80%。与未经等离子体轰击的In2O3∶Sn薄膜相比,经等离子体轰击的In2O3∶Sn薄膜具有更好的结晶性能和更高的纳米硬度。优化后的In2O3∶Sn薄膜可有效提升有机太阳能电池的填充因子和转换效率,该材料还可应用于隔热涂层和气体传感器等节能与环保领域。Indium tin oxide(In2O3∶Sn)is a key material for organic solar cell electrodes.However,due to the high temperature deposition conditions required for the crystallization of In2O3∶Sn film,the performance of the substrate will be reduced,which affects the photoelectric performance of solar cells.A new plasma bombardment technique was introduced into the conventional magnetron sputtering process to improve the room temperature crystallization properties of In2O3∶Sn films.The effect of plasma bombardment technique with different pulsed DC voltages on the electrical and mechanical properties of In2O3∶Sn films was investigated.It is observed that film crystallization can be significantl enhanced when the pulsed DC voltage(|Vp|)is higher than|-500 V|(|Vp|[|-500 V|).By applying the plasma bombardment process,In2O3∶Sn films prepared at room temperature with thickness of 135 nm shows low resistivity of 4.11×10^-4Ωcm,mobility of 42.1 cm^2/Vs,and transmittance over 80%in the visible range.Compared with the In2O3∶Sn films without plasma bombardment process,the In2O3∶Sn films with plasma bombardment show better crystallization.The optimized In2O3∶Sn can effectively improve the filling factor and conversion efficiency of organic solar cells.The material can also be used in energy saving and environmental protection fields such as thermal insulation coatings and gas sensors.

关 键 词：有机太阳能电池 氧化铟锡 等离子体轰击 结晶 光电性能 

分 类 号：TQ133.5+3[化学工程—无机化工] TQ152