金属连接体用Mn-Cu尖晶石涂层的制备及其高温氧化导电性能  

High Temperature Oxidation Behavior and Conductivity of Prepared Mn-Cu spinel Coating for Metal Interconnects

作　　者：周天池 丁江涛 赖永彪 孙杭 郭平义[1] ZHOU Tianchi;DING Jiangtao;LAI Yongbiao;SUN Hang;GUO Pingyi(School of Materials Science and Engineering,Jiangsu University of Science and Technology,Zhenjiang 212003.China)

机构地区：[1]江苏科技大学材料科学与工程学院,镇江212003

出　　处：《腐蚀与防护》2020年第1期9-13,共5页Corrosion & Protection

基　　金：国家自然科学基金(51201073);江苏省研究生创新项目(KYCX17_1830)。

摘　　要：为阻止Cr的外扩散、改善金属连接体的高温性能,采用高能微弧合金化(HEMAA)工艺,选用Mn-35Cu(原子分数%)合金电极在430SS基体上制备了Cu-Mn尖晶石涂层,然后在750℃空气中原位氧化得到Cu-Mn复合尖晶石涂层。结果表明:Cu-Mn复合尖晶石涂层致密,附着力良好;涂层的主要成分除了Cu-Mn尖晶石氧化物外,还含有一定量的Mn2O3,氧化层中基体元素Cr、Fe含量较低。涂层在800℃时的面比电阻测试结果显示,氧化100h后得到的复合Cu-Mn尖晶石涂层的电阻值为10mΩ·cm2。高能微弧合金化原位氧化后的复合Cu-Mn尖晶石涂层是一种很有前景的金属连接体涂层。In order to prevent the external diffusion of Cr and improve the high temperature performance of metal joints,Cu-Mn spinel was prepared on 430 SS substrate by high energy microarc alloying(HEMAA)process using Mn-35 Cu(atomic fraction%)alloy electrode,and then,in situ oxidization in air at 750℃ was used to obtain a CuMn composite spinel coating.The results showed that Cu-Mn composite spinel coating wass dense and had good adhesion.In addition to Cu-Mn spinel oxide,the main component of the coating also contained a certain amount of Mn2 O3,and the content of Cr and Fe in the oxide layer was low.The area specific resistance test of the coating at800℃ showed that the resistance of the composite Cu-Mn spinel coating obtained after oxidation for 100 hwas 10 mΩ·cm2.The composite Cu-Mn spinel coating after in-situ oxidation of high energy micro-arc alloy was a promising metal linker coating.

关 键 词：尖晶石 连接体 Cu-Mn 涂层 原位氧化 

分 类 号：TG174.4[金属学及工艺—金属表面处理]