导模法生长超大尺寸蓝宝石板材的研究  

Study on the Growth of Super Large Sapphire Plate by EFG Method

作　　者：王东海[1] 徐军[1] 李东振 王庆国[1] 罗平[1] 董建树 潘燕萍 WANG Donghai;XU Jun;LI Dongzhen;WANG Qingguo;LUO Ping;DONG Jianshu;PAN Yanping(School of Physics and Engineering, Tongji University, Shanghai 200092, China;Nanjing Tongli Crystal Materials Research Institute, Nanjing 211212, China;Changzhou Lemeng Pressure Vessel Co., Ltd, Changzhou 213001, China)

机构地区：[1]同济大学物理科学与工程学院,上海200092 [2]南京同溧晶体材料研究院,南京211212 [3]常州市乐萌压力容器有限公司,常州213001

出　　处：《人工晶体学报》2020年第3期398-401,共4页Journal of Synthetic Crystals

基　　金：国家自然科学基金(61805177,61621001)。

摘　　要：采用自主设计制造的导模炉,通过热场模拟辅助设计出理想的模具表面温度分布,采用两段加热的方式控制晶体的应力和气泡缺陷,选择合适的提拉速率控制气泡层的分布,成功生长了高质量超大尺寸蓝宝石单晶板材,蓝宝石板材可利用尺寸690 mm×300 mm×12 mm。摇摆曲线半高宽为0.0163°,说明晶体具有良好的结晶质量。5 mm厚度样品的透过光谱测试表明,透过率与用其它晶体生长方法的晶体相同。The super large sapphire single crystal plate was successfully grown in a self-designed single-crystal growth furnace with edge-defined film-fed growth(EFG)method,the ideal temperature distribution of the die surface was designed by thermal field simulation.Two-stage heating is used to control the crystal stress and bubble defects,and to choose a suitable pulling rate to control the distribution of the bubble layer.The crystal could yield a plate with usable dimensions of up to 690 mm×300 mm×12 mm,X-ray diffraction show a full-width at half-maximum(FWHM)of the rocking curve of 0.0163°,indicating a high crystalline quality.Results of transmission measurements performed on 5 mm thick samples are presented and the transmission is similar to sapphire grown by other techniques.

关 键 词：导模法 光电窗口 蓝宝石板材 

分 类 号：O734[理学—晶体学]