三层SiNx-SiNx-SiO2减反射膜对多晶硅太阳电池性能的影响  

Effect of Three-layer SiNx-SiNx-SiO2 Anti-reflection Films for Polycrystalline Silicon Solar Cells Performance

作　　者：马新尖 MA Xinjian(Information Technology Department, Lhasa Normal College, Lhasa 850000, China)

机构地区：[1]拉萨师范高等专科学校信息技术系,拉萨850000

出　　处：《人工晶体学报》2020年第3期521-525,共5页Journal of Synthetic Crystals

基　　金：西藏自治区自然科学基金(XZ2017ZRG-105)。

摘　　要：本文分析了双层SiNx-SiNx减反射膜和带有氧化层的三层SiNx-SiNx-SiO2减反射膜对多晶硅太阳电池性能的影响。模拟结果表明,增加了氧化层的三层SiNx-SiNx-SiO2减反射膜多晶硅太阳电池电学输出特性优于双层SiNx-SiNx减反射膜多晶硅太阳电池。实验分析表明,三层SiNx-SiNx-SiO2减反射膜反射率略高于双层SiNx-SiNx减反射膜反射率,增加了氧化层的三层SiNx-SiNx-SiO2减反射膜多晶硅太阳电池具有更好的钝化效果,使得其光电转化效率有所增加。In this paper,the effects of double-layer SiNx-SiNx anti-reflection films and three-layer SiNx-SiNx-SiO2 anti-reflection films with oxide layer for polycrystalline silicon solar cells performance were analyzed.The simulation results show that the electrical output characteristics of the three-layer SiNx-SiNx-SiO2 anti-reflection films polycrystalline silicon solar cells with oxide layer are better than the double-layer SiNx-SiNx anti-reflection films polycrystalline silicon solar cells.Experimental analysis show that the reflectivity of the three-layer SiNx-SiNx-SiO2 anti-reflection films is slightly higher than that of the double-layer SiNx-SiNx anti-reflection films,but the three-layer SiNx-SiNx-SiO2 anti-reflection films polycrystalline silicon solar cells with oxide layer have a good passivation effect,and increased the photoelectric conversion efficiency.

关 键 词：PC1D SiNx-SiNx-SiO2 减反射膜 多晶硅太阳电池 

分 类 号：TM914.41[电气工程—电力电子与电力传动]