表面等离激元热载流子光电探测器研究进展  

Research Progress on Surface Plasmon Hot-Carrier Photodetectors

作　　者：邱开放 翟爱平 王文艳 李国辉 郝玉英 崔艳霞 Qiu Kaifang;Zhai Aiping;Wang Wenyan;Li Guohui;Hao Yuying;Cui Yanxia(Key Laboratory of Interface Science and Engineering in Advanced Materials(Ministry of Education),College of Physics and Optoelectronics,Taiyuan University of Technology,Taiyuan 030024,China)

机构地区：[1]太原理工大学物理与光电工程学院新材料界面科学与工程教育部重点实验室,太原030024

出　　处：《半导体技术》2020年第3期169-178,共10页Semiconductor Technology

基　　金：国家自然科学基金资助项目(61775156,61475109,61605136,61705155);山西省自然科学基金优秀青年基金资助项目(201701D211002);山西省重点研发(国际合作)项目(201603D421042);山西省青年拔尖人才;青年三晋学者;山西省平台基地专项(201605D 131038)。

摘　　要：表面等离激元热载流子光电探测器最近几年颇受关注。可通过合理设计金属微纳结构,如改变其构成、形状、维度来实现能量低于材料带隙的光子光电转换,提升现有器件的综合性能。这一思路极大地拓展了传统半导体光电器件的设计范畴,因此被广泛应用于光催化、光伏、光电探测等领域。综述了表面等离激元热载流子光电探测器的研究进展,介绍了其工作原理,并根据金属微纳结构的不同,从器件物理与计算、关键工艺、关键材料和应用范畴等方面详细介绍了颗粒型、光栅型和其他复合型结构的表面等离激元热载流子光电探测器的研究历史及现状,最后对表面等离激元热载流子光电探测器的应用前景进行了展望。Surface plasmon hot-carrier photodetectors have attracted significant attention in recent years. By designing the metal nanostructure properly, such as changing its composition, shape and dimensions, photoelectric conversion of the photonic with an energy lower than the material bandgap can be achieved, and the comprehensive performance of current devices can be improved. This idea greatly expands the design scope of conventional semiconductor optoelectronic devices, and is widely used in the fields of photocatalysis, photovoltaic, photodetection, etc. The research progress on surface plasmon hot-carrier photodetectors are reviewed. After describing its working principle, research history and current situation of different metal micro-nanostructures, such as particle-type, grating-type and other composite structures are introduced in detail with regard to the physical mechanism, theoretical computation, critical experiment processes, materials and application areas. Finally, the application prospects of surface plasmon hot-carrier photodetectors are prospected.

关 键 词：光电探测器 光电子器件 表面等离激元 热载流子 微纳结构 

分 类 号：TN36[电子电信—物理电子学]