微纳米VO2膜层高温相变原位X射线衍射测试方法研究  

In-situ X-ray Diffraction Test Method for High-temperature Phase Transition of Micro-nano VO2 Films

作　　者：崔喜平 姚尧[2] 葛玉强 郜闹闹 曾岗 李雪 洪光辉 郑振 CUI Xi-ping;YAO Yao;GE Yu-qiang;GAO Nao-nao;ZENG Gang;LI Xue;HONG Guang-hui;ZHENG Zhen(Center of Analysis and Measurement,Harbin Institute of Technology,Harbin 150001,Heilongjiang China;School of Materials Science and Engineering,Harbin 150001,Heilongjiang China)

机构地区：[1]哈尔滨工业大学分析测试中心,黑龙江哈尔滨150001 [2]哈尔滨工业大学材料科学与工程学院,黑龙江哈尔滨150001

出　　处：《分析测试技术与仪器》2020年第1期11-16,共6页Analysis and Testing Technology and Instruments

摘　　要：通过设计、自制加热样品台结合商业X射线衍射仪的小角掠入射衍射模式,开发了微纳米膜层的原位高温相变测试方法,解决了样品表面微纳米膜层材料(厚度<10μm)的高温相变难以原位测量的问题.研究了样品台与膜层表面的温度分布特征,验证了自制加热样品台的控温效果,原位测试了不同温度下二氧化钒(VO2)膜层的X射线衍射图谱,揭示了VO2膜层的高温相变行为.In order to solve the in-situ measurement of high-temperature phase transition of micro-nano films(<10μm thick)on the substrate,in the present work a self-designed heating sample stage and the grazing incidence X-ray diffraction mode of a commercial X-ray diffractometer were skillfully combined,and thus a novel in-situ measurement method of high-temperature phase transition of micro-nano films was proposed.The characteristics of temperature distributions on the surface of the sample stage and the micro-nano films were investigated,and the temperature control effect of the in-house fabricated heating sample stage was hence verified.Finally,the X-ray diffraction(XRD)patterns of the micro-nano vanadium dioxide(VO 2)films at different temperatures were obtained and the high temperature phase transition of micro-nano VO 2 films was clarified.

关 键 词：微纳米膜层 X射线衍射 原位测量 高温相变 

分 类 号：O657.34[理学—分析化学]