微型傅立叶变换光谱仪的优化设计与实验研究  

Optimization design and experimental study of micro-Fourier transform spectrometer

作　　者：赵云 吕金光[1] 秦余欣[1] 陶金 梁中翥[1] 王维彪[1] 尼启良[1] 孟德佳 梁静秋[1] ZHAO Yun;LV Jin-guang;QIN Yu-xin;TAO Jin;LIANG Zhong-zhu;WANG Wei-biao;NI Qi-liang;MENG De-jia;LIANG Jing-qiu(Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033,China;University of Chinese Academy of Sciences, Beijing 100049,China)

机构地区：[1]中国科学院长春光学精密机械与物理研究所应用光学国家重点实验室,吉林长春130033 [2]中国科学院大学,北京100049

出　　处：《中国光学》2020年第2期411-425,共15页Chinese Optics

基　　金：国家自然科学基金资助项目(No.61627819,No.61575193,No.61805239,No.61727818,No.61735018);吉林省科技发展计划(No.20190303063SF,No.20180201024GX,No.20150520101JH,No.20170204077GX,No.20190101012JH,No.20160204064GX);中国科学院青年创新促进会基金(No.2018254,No.2014193);吉林省中青年科技创新领军人才及团队项目(No.20190101012JH);应用光学国家重点实验室开放基金。

摘　　要：为了实现傅立叶变换光谱仪的微型化与轻量化,设计了轻型栅条分束器结构,代替传统的平行平板分束器,分析了轻型栅条分束器的栅棱对光谱复原的影响,提出了制作误差容限。对微型傅立叶变换光谱仪进行了建模仿真,得到了轻型栅条分束器的最佳结构。通过系统仿真进行光谱反演,得到了复原光谱,并计算了轻型栅条分束器引入的光谱误差。完成了原理样机的搭建与调试,得到了实际系统的复原光谱,证明了微型化系统的可行性。该微型化系统相对于传统傅立叶变换光谱仪,具有体积小,稳定性好的优点,可用于在线监测。In order to achieve the goal of miniaturization and light weight of Fourier transform spectrometer,a light-weight grid beam splitter structure was designed instead of the traditional parallel plate beam splitter.The influence of the grid edge of the grid beam splitter on spectrum reconstruction was analyzed,and the tolerance of production error was proposed.The micro-Fourier transform spectrometer was modeled and simulated,and the optimal structure of the grid beam splitter was obtained.The spectral inversion was performed by system simulation,and the restored spectrum was obtained.The spectral error introduced by the grid beam splitter was calculated.The construction and debugging of the prototype was completed,and the recovered spectrum of the actual system was obtained,which proved the feasibility of the miniaturized system.Compared with the traditional Fourier transform spectrometer,the miniaturization system has the advantages of small volume and good stability,and can be used for online monitoring.

关 键 词：微型傅立叶变换红外光谱仪 轻型栅条分束器 光谱复原 

分 类 号：O436[机械工程—光学工程]