基于MEMS加速度传感器的位移测量系统  

Displacement Measurement System Based on MEMS Acceleration Sensor

作　　者：牛伟萌 房立清 齐子元 郭德卿 NIU Wei-meng;FANG Li-qing;QI Zi-yuan;GUO De-qing(Army Engineering College Shijiazhuang Campus Artillery Department,Shijiazhuang 050003,China)

机构地区：[1]陆军工程大学石家庄校区火炮工程系,河北石家庄050003

出　　处：《仪表技术与传感器》2020年第3期62-66,72,共6页Instrument Technique and Sensor

摘　　要：针对运动载体位移智能化精确测量问题,基于MEMS加速度传感器设计了一种体积小、可靠性强、适用于较长距离的位移测量系统。首先分析了利用加速度进行位移测量的原理和误差,设计了加速度数值积分的多项式拟合算法,然后设计了测量系统硬件电路,最后对系统进行了直线滑轨平台测试,实验表明该测量系统位移测量最小误差可达0.3%,满足实际工程需求。Aiming at the problem of intelligent and accurate measurement of motion carrier displacement,a displacement measuring system with small volume,high reliability and suitable for long distance was designed based on MEMS accelerometer.Firstly,the principle and error of displacement measurement using acceleration were analyzed.The polynomial fitting algorithm of acceleration numerical integration was designed.Then the hardware system of measurement system was designed.Finally,the linear slide platform test was carried out on the system.Experiments show that the minimum error of the displacement measurement can reach 0.3%,which meets the actual engineering requirements.

关 键 词：MEMS加速度传感器 加速度积分 拟合算法 位移测量系统 

分 类 号：TB52[理学—物理]