250mm口径低温泵设计  

Design of the 250mm Caliber Cryopump

作　　者：曾环 邓家良 孙志和[1,2] ZENG Huan;DENG Jia-liang;SUN Zhi-he(China Electronic Technology Corporation 16th Institute,Hefei 230088,China;Vacree Technology Co.,Ltd,Hefei 230088,China)

机构地区：[1]中国电子科技集团第十六研究所,安徽合肥230088 [2]安徽万瑞冷电科技有限公司,安徽合肥230088

出　　处：《真空》2020年第2期13-16,共4页Vacuum

基　　金：极大规模集成电路制造装备及成套工艺(2014ZX02001-003)。

摘　　要：介绍了250mm口径低温泵的设计及计算,详细列出壳体、吸附阵、冷屏、障板等部件的设计。文中对壳体强度,冷屏、障板和冷凝板的热负荷进行详细计算。通过对冷屏、障板和吸附阵进行温度场分析,校核了计算的准确性,同时又为实际试验提供了理论依据和温度参考。This paper introduces the design and calculation of the 250 mm caliber cryopump, and details the design of components such as pump body, adsorption array, radiation shield and louvers. The strength of the shell and the heat load of the cold screen and the baffles and condensing plates are calculated in detail. By analyzing the temperature field of the cold screen,the barrier plate and the adsorption array, the accuracy of the calculation is checked, and the theoretical basis and temperature reference are provided for the actual test.

关 键 词：低温泵 制冷机 吸附阵 热负荷 有限元分析 

分 类 号：TB752.53[一般工业技术—真空技术]