BAW滤波器板上测试夹具设计  

Design of BAW Filter On-board Test Fixture

作　　者：许夏茜 高杨[2] 袁靖 XU Xiaxi;GAO Yang;YUAN Jing(School of Information Engineering, Southwest University of Science and Technology, Mianyang 621010, China;Microsystem Centre,Southwest University of Science and Technology,Mianyang 621010, China)

机构地区：[1]西南科技大学信息工程学院,四川绵阳621010 [2]西南科技大学微系统中心,四川绵阳621010

出　　处：《压电与声光》2020年第2期149-154,158,共7页Piezoelectrics & Acoustooptics

基　　金：国家自然科学基金资助项目(61574131);西南科技大学研究生创新基金资助项目(19ycx0108)。

摘　　要：针对体声波(BAW)滤波器与测试仪器间接口形式不同而无法直接测试的问题,设计了一款BAW滤波器板上测试夹具。首先根据经验公式初步确定夹具介质基片厚度,并导入ADS中LineCacl工具,计算出夹具微带线长度、宽度的初始值;在ADS中建立TDR瞬态仿真电路,进行微带线阻抗不匹配研究,给出相应的解决方法,将初始设计的夹具结构参数导入ADS进行阻抗匹配复核;选用3款不同中心频率的BAW滤波器作为待测器件(DUT),分别进行了片上探针和板上夹具测试,并将同一滤波器测试结果的散射参数矩阵参量(S11、S12、S21、S22)曲线进行对比。对比结果表明,与片上测试相比,板上测试曲线略有偏移,但两者趋势一致;板上测试S12-S21曲线、S11-S22曲线吻合较好。板上测试结果可为后续去嵌入校准提供比较可靠的初始值。In order to solve the problem that Bulk Acoustic Wave(BAW)filter and the test instrument cannot be directly tested due to different interface forms,an on-board test fixture for BAW filter is designed in this paper.Firstly,the thickness parameter of the dielectric substrate of the test fixture was preliminarily determined according to the experience formula,and the initiallength and width of the micro-strip transmission line of the test fixture were calculated by the tool-LineCaclin ADS.Secondly,the TDR transient simulation circuit was established in ADS to study the impedance mismatching of micro-strip line,and the methods to solve the mismatching were presented.And then,the initial structural parameters of the designed fixture were imported into ADS for checking the impedance matching.Finally threeBAW filters with different center frequency were selected as the device under test(DUT)respectively to do the on-wafer probe and the on-board fixture test.Three comparisons of S12 on-board vs S12 on-wafer,S12 on-board vs S21 on-board,S11 on-board vs S22 on-board were carried out according to the test results of the scattering parameter matrix parameters(S11、S12、S21、S22)curves of the same filter.The comparison resultsshow that the whole test curve of on-board fixture test is slightly offset fromthat on-wafer probe test,but the trend of the whole curve is consistent,the S12-S21 and S11-S22 curves of the on-board test areall in good agreement.The on-board fixture test results can provide a reliable initial value for subsequent de-embedding calibration.

关 键 词：体声波(BAW)滤波器 板上测试 夹具 S参数 

分 类 号：TN606[电子电信—电路与系统] TN06