自动加料单晶炉的设计与研究  

Design and Study of Automatic Feeding Czochralski Crystal Furnace

作　　者：李海林[1] 武欢[1] 王瑞 LI Hailin;WU Huan;WANG Rui(The 26th Institute of China Electronics Technology Group Corporation, Chongqing 400060,China)

机构地区：[1]中国电子科技集团公司第二十六研究所,重庆400060

出　　处：《压电与声光》2020年第2期203-206,共4页Piezoelectrics & Acoustooptics

摘　　要：由于传统的晶体生长设备不具备加料功能,在晶体生长过程中无法进行原料补充,所以最终的晶体尺寸通常受制于坩埚和设备大小。而更大尺寸的坩埚和设备成本高,这制约了大尺寸晶体的研究和发展。该文设计了一种自动加料系统,可根据已生长的晶体质量向坩埚内补充同等质量的原料,确保坩埚内固-液界面保持不变,从而实现小坩埚生长大尺寸晶体的目标,提高了设备利用率,节约了能源,降低了生产成本,促进了大尺寸晶体的发展。Since the conventional crystal growth equipment does not have a feeding function,and the raw materials cannot be replenished during the crystal growth process,the final crystal size is usually subjected to the size of the crucible and the equipment,while the cost of larger size crucible and equipment is high,which restricts the research and development of large size crystal.In this paper,an automatic feeding system is designed,which can supply the same mass of raw materials to the crucible according to the quality of the grown crystal,and ensure that the solid-liquid interface in the crucible remains unchanged,so as to achieve the goal of growing largesize crystal in a small crucible,improve the utilization rate of equipment,save energy,reduce production costs,and promote the development of largesize crystal.

关 键 词：自动加料 提拉单晶炉 晶体生长 大尺寸晶体 

分 类 号：TN304.053[电子电信—物理电子学]