Zn-Nb-O微波介质陶瓷的结构与性能研究  

Study on the Structure and Properties of Zn-Nb-O Microwave Dielectric Ceramics

作　　者：王海宝 王峥 庞振江 李越 任孝武 周加斌 史建利 高峰[2] WANG Haibao;WANG Zheng;PANG Zhenjiang;LI Yue;REN Xiaowu;ZHOU Jiabin;SHI Jianli;GAO Feng(Beijing Smart-Chip Microelectronics Technology Co., Ltd,Beijing 100192,China;State Key Laboratory of Solidification Processing,College of Material Science and Engineering,Northwestern Polytechnical University,Xi’an 710072,China;State Grid Shandong Electric Power Research Institute,Jinan 250003,China;China Electric Power Research Institute Co.,Ltd,Beijing 100192,China)

机构地区：[1]北京智芯微电子科技有限公司,北京100192 [2]西北工业大学材料学院凝固技术国家重点实验室,陕西西安710072 [3]国网山东省电力公司电力科学研究院,山东济南250003 [4]中国电力科学研究院有限公司,北京100192

出　　处：《压电与声光》2020年第2期259-262,267,共5页Piezoelectrics & Acoustooptics

基　　金：国家电网有限公司科技基金资助项目(520626180033)。

摘　　要：采用传统固相反应法制备(1-x)(0.7ZnNb2O6-0.3Zn3Nb2O8)-xZnAl2O4 (摩尔分数x=0~10%,ZZZ)微波介质陶瓷,研究了其物相组成、晶体结构及微波介电性能。结果表明,ZZZ材料能在1 150 ℃烧结成瓷,形成了ZnNb2O6、Zn3Nb2O8和ZnAl2O4共存的复相结构,无其他新相生成。在微波频率下,ZZZ陶瓷的介电常数为21~24,品质因数与频率之积(Q×f)为30 000~85 000 GHz。随ZnAl2O4含量的增加,ZZZ陶瓷的微波介电常数、Q×f值及谐振频率温度系数均减小,温度稳定性提高。The (1-x)(0.7ZnNb2O6-0.3Zn3Nb2O8)-xZnAl2O4 (x=0~10%, ZZZ) microwave dielectric ceramics were prepared by the conventional solid-state reaction process. The phase composition, microstructure and microwave dielectric properties of the ZZZ ceramics were investigated. The results show that the ZZZ ceramics can be sintered into porcelain at 1 150 ℃, forming a multiphase structure in which ZnNb2O6, Zn3Nb2O8 and ZnAl2O4 coexist without appearance of new phases. At microwave frequency, the dielectric constant of ZZZ ceramics is 21 to 24, and the product of quality factor and frequency (Q×f) is 30 000 GHz to 85 000 GHz. With the increase of ZnAl2O4 content, the microwave dielectric constant, Q×f value, and temperature coefficient of resonance frequency of ZZZ ceramics decrease, and the temperature stability improves.

关 键 词：铌酸锌 复相陶瓷 显微结构 微波介电性能 温度稳定性 

分 类 号：TN384[电子电信—物理电子学]