热阴极电离规管频繁损坏故障分析与处理  

Analysis and Treatment of Frequent Damage of Hot Cathode Ionization Gauge

作　　者：申承志[1] 张海明[1] SHEN Chengzhi;ZHANG Haiming(The 13^th Research Institute of CETC,Shijiazhuang 050051,China)

机构地区：[1]中国电子科技集团公司第十三研究所,河北石家庄050051

出　　处：《电子工业专用设备》2020年第2期65-68,共4页Equipment for Electronic Products Manufacturing

摘　　要：介绍了热阴极电离规管频繁出现损坏的情况。讲述了热阴极电离真空计原理。通过试验确认了电离规管频繁损坏是在做完工艺并关闭高阀后到真空度降到8 Pa这段时间发生。热阴极电离规管的一个缺点是在(绝对)压强大于1E-1 Pa时,容易氧化灯丝。经过试验确认,热阴极电离规管长时间处于1E-1 Pa到8 Pa间导致了该故障。采用了修改电路和PLC程序的方法,解决了电离规管频繁损坏故障。另外,提高国产复合真空计对电离规管的保护,还有待进一步研究。This paper introduces the frequent damage of hot cathode ionization gauge.The principle of hot cathode ionization vacuum gauge is described.Through the test,it is confirmed that the frequent damage of ionization gauge occurs after finishing the process and closing the high valve until the vacuum degree drops to 8 Pa.One disadvantage of the hot cathode ionization gauge is that it is easy to oxidize the filament when the(absolute)pressure is greater than 1E-1 Pa.It is confirmed that the hot cathode ionization gauge tube is between 1E-1 Pa and 8 Pa for a long time,which led to the failure.The circuit and PLC program are modified to solve the frequent damage of ionization gauge.In addition,the protection of domestic composite vacuum gauge to ionization gauge needs to be improved.

关 键 词：热阴极 电离规 频繁损坏 钎焊炉 

分 类 号：TN321[电子电信—物理电子学]