一种薄膜材料电阻率测试用环形电极设计  

Ring Electrode Design for Resistivity Test of Thin Film Materials

作　　者：国北辰 陈少华[1] 王书强[1] 蔡建臻[1] 孙超 王伟 GUO Bei-chen;CHEN Shao-hua;WANG Shu-qiang;CAI Jian-zhen;SUN Chao;WANG Wei(Beijing Orient Institute of Measurement and Test,Beijing 100086,China)

机构地区：[1]北京东方计量测试研究所,北京100086

出　　处：《计量学报》2020年第3期349-353,共5页Acta Metrologica Sinica

摘　　要：针对航天器用高电阻率薄膜材料的电阻率测试问题进行了研究。通过对现有高阻值电阻率测试环形电极设计方法进行仿真理论分析,结合数学模型推导,提出了一种环形电极有效测试宽度及尺寸设计取值方法,并制成薄膜材料测试用环形电极装置。通过实验实现了航天器用薄膜材料表面电阻率和体电阻率测量,相对示值误差可控制在9%范围内;该装置可应用于体积电阻率在105~1018Ω·cm的航天器用复合材料电阻率的测试。To study resistivity test of high resistivity thin film materials for spacecraft,based on the simulation analysis of the existing design method of ring electrode for high-resistance resistivity test,combined with the mathematical model derivation,a methed of design value for a ring electrode effective test width and size was proposed,and a ring electrode device for spacecraft thin film material measurement was desighed.Through the experiment,the surface resistivity and volume resistivity of the film material for spacecraft were measured,and the margin of indication error was controlled within 9%.It can be applied to the resistivity test of composite material for spacecraft with a volume resistivity of 105~1018Ω·cm.

关 键 词：计量学 电阻率测试 薄膜材料 环形电极 

分 类 号：TB971[一般工业技术—计量学]