熔融石英光学元件亚表面缺陷三维重构技术  

Three-Dimensional Reconstruction Technology of Subsurface Defects in Fused Silica Optical Components

作　　者：张健浦 孙焕宇 王狮凌 黄进[2] 周晓燕[2] 王凤蕊[2] 刘红婕[2] 刘东[1] Zhang Jianpu;Sun Huanyu;Wang Shiling;Huang Jin;Zhou Xiaoyan;Wang Fengrui;Liu Hongjie;Liu Dong(State Key Laboratory of Modern Optical Instrumentation,College of Optical Science and Engineering,Zhejiang University,Hangzhou,Zhejiang 310027,China;Laser Fusion Research Center,China Academy of Engineering Physics,Mianyang,Sichuan621900,China)

机构地区：[1]浙江大学光电科学与工程学院现代光学仪器国家重点实验室,浙江杭州310027 [2]中国工程物理研究院激光聚变研究中心,四川绵阳621900

出　　处：《光学学报》2020年第2期135-145,共11页Acta Optica Sinica

基　　金：国家自然科学基金(41775023,61475141)。

摘　　要：熔融石英光学元件的亚表面缺陷直接影响着其成像质量及激光损伤阈值等指标。相比缺陷的二维截面大小以及深度信息,亚表面缺陷三维轮廓及缺陷体积的定量检测结果可以用来更准确地评估熔融石英光学元件的加工质量。结合共聚焦显微镜的成像原理,使用共聚焦显微镜进行了熔融石英样品层析扫描实验。通过对亚表面缺陷图像特点的分析,提出了适用熔融石英元件亚表面缺陷的三维重建算法。提出的算法在亚表面缺陷重建效率与精度上均优于其他三维重建方法。根据重建后缺陷的统计结果,定量获得了熔融石英样品亚表面缺陷的完整三维信息。Subsurface defects directly affect the imaging quality and laser damage threshold of fused silica optical components.In comparison with the two-dimensional cross-section size and depth of the defect,the quantitative detection results of the three-dimensional contour of the subsurface defect and its volume can facilitate a more accurate evaluation of the processing quality of the fused silica optical component.In this work,a tomography scanning experiment of the fused silica sample is performed using a confocal microscope based on the principle of confocal microscope.Moreover,a three-dimensional reconstruction algorithm for the subsurface defects of fused silica components is proposed based on the analysis of the characteristics of subsurface defect images.The proposed algorithm outperforms other reconstruction methods in terms of efficiency and accuracy.Based on the statistical results of the reconstructed defects,the complete three-dimensional information of the subsurface defects of the fused silica samples is quantitatively obtained.

关 键 词：材料 熔融石英 亚表面缺陷 三维重建 激光共聚焦显微镜 

分 类 号：TH161.14[机械工程—机械制造及自动化]