液晶可调谐VCSEL中高对比光栅结构的设计  

High-Contrast Grating Structure Design for Liquid Crystal Tunable Vertical-Cavity Surface-Emitting Lasers

作　　者：郑舟 邹永刚 石琳琳 房俊宇 王海珠 范杰 崔超 徐莉 马晓辉 Zheng Zhou;Zou Yonggang;Shi Linlin;Fang Junyu;Wang Haizhu;Fan Jie;Cui Chao;Xu Li;Ma Xiaohui(State Key Laboratory of High Power Semiconductor Lasers,Changchun University of Science and Technology,Changchun,Jilin 130022,China;The First Military Command Office of the Army in Changchun,Changchun,Jilin 130022,China)

机构地区：[1]长春理工大学高功率半导体激光国家重点实验室,吉林长春130022 [2]陆军驻长春地区第一军事代表室,吉林长春130022

出　　处：《激光与光电子学进展》2020年第1期122-128,共7页Laser & Optoelectronics Progress

基　　金：吉林省教育厅“十三五”科学技术项目(JJKH20190543KJ);吉林省科技发展计划项目(20180519018JH,20190302052GX);长春理工大学校青年基金(XQNJJ-2018-19)。

摘　　要：基于严格耦合波理论设计了一种以液晶为低折射率材料的Si-SiO2复合高对比光栅,该光栅适合用于实现液晶可调谐功能的垂直腔面发射半导体激光器件。当940nm的TM偏振光入射时,通过优化参数可得到宽带(Δλ=256nm)高反射率(R>99%)且具有偏振稳定性的光栅结构,满足垂直腔面发射半导体激光器顶部腔面反射镜要求。液晶折射率的改变不会影响光栅的性能,未来有望将高对比光栅或混合光栅与液晶可调谐垂直腔面发射半导体激光器相结合,实现可调谐半导体激光器。In this paper,the rigorous coupled-wave analysis theory is used to simulate a hybrid Si/SiO2 highcontrast grating using a liquid crystal as a low refractive index material,which is suitable for liquid crystal tunable vertical-cavity surface-emitting lasers(VCSEL).Using 940-nm TM polarized incident light,the parameters of the grating structure can be optimized to obtain broadband(Δλ=256 nm),high reflectivity(R>99%),and polarization-stabilized characteristics that satisfy the VCSEL top mirror requirements.Changes in the refractive index of the liquid crystal do not affect the quality of the grating.Liquid crystal tunable VCSELs are expected to be combined with different high-contrast gratings and hybrid gratings in the future.

关 键 词：激光器 可调谐垂直腔面发射半导体激光器 高对比光栅 液晶 高反射率 耦合波理论 

分 类 号：TN248.4[电子电信—物理电子学]