全视场外差短相干形貌测量技术  

Full-field heterodyne short coherent topography measurement technology

作　　者：吕彤 张文喜[1,2] 吕笑宇 李杨[1,2] 伍洲[1] 孔新新 LU Tong;ZHANG Wen-xi;LU Xiao-yu;LI Yang;WU Zhou;KONG Xin-xin(Key Laboratory of Computational Optics Imaging Technology,Academy of Opto-Electronics,Chinese Academy of Sciences,Beijing 100094,China;School of Optoelectronics,University of Chinese Academy of Sciences,Beijing 100094,China)

机构地区：[1]中国科学院光电研究院,计算光学成像技术重点实验室,北京100094 [2]中国科学院大学光电学院,北京100094

出　　处：《光学精密工程》2020年第4期800-807,共8页Optics and Precision Engineering

基　　金：国家自然科学基金青年科学基金资助项目(No.61605217)。

摘　　要：针对工业检测中对微米量级测量精度、秒级测量时间的检测需求,提出了全视场外差短相干形貌测量方案。本方案采用短相干光源,实现大步长测量,节约扫描时间;采用全视场外差技术,实现干涉轮廓的快速反演,在抑制振动、直流噪声对测量精度影响的同时,提高数据反演的效率。搭建了实验验证系统,对测量时间和测量精度进行了实验验证,结果表明,系统的探测时长小于10 s,测量精度优于2μm。后续经进一步优化设计,探测时间可小于5 s,探测精度优于微米量级。该方案具有测量速度较快和测量精度较高等优势,在对效率要求较高的工业检测领域具有一定的应用前景。To satisfy the requirements of micron-level measurement accuracy and second-level measurement time in industrial detection,this study proposes a full-field heterodyne short coherent topography measurement scheme.A light source with short coherence is developed to achieve long stride measurement and save scanning time.This study uses full-field heterodyne technology to achieve fast inversion of interference contours,and suppresses the effects of vibration and DC noise on measurement accuracy to improve the efficiency of data inversion.Furthermore,an experimental verification system was set up,and the detection time of the system was verified to be less than 10 s with measurement accuracy superior to 2μm.The measurement time achieved by the system could be improved to less than 5 s with micron-level measurement accuracy by further optimizing the design.Therefore,the proposed technology was verified to be capable of satisfying the measurement requirements in industrial detection with the advantages of faster measurement speed and higher measurement accuracy compared to existing methods,and has prospective applications in the field of highly efficient industrial detection.

关 键 词：光学测量 三维形貌 短相干测量 全视场外差 

分 类 号：P164[天文地球—天文学]