图像式角位移测量的光栅偏心度监测系统  

Grating eccentricity monitoring system for image-based angular displacement measurement

作　　者：王亚洲 于海[2] 易进 张士伟 韦宗喜 WANG Ya-zhou;YU Hai;YI Jin;ZHANG Shi-wei;WEI Zong-xi(Changguang Satellite Technology Co.,Changchun 130000,China;Changchun Institute of Optics,Fine Mechanics and Physics,Chinese Academy of Sciences,Changchun 130033,China)

机构地区：[1]长光卫星技术有限公司,吉林长春130000 [2]中国科学院长春光学精密机械与物理研究所,吉林长春130033

出　　处：《光学精密工程》2020年第5期1038-1045,共8页Optics and Precision Engineering

基　　金：国家自然科学基金资助项目(No.51605465);吉林省重大科技攻关项目(No.20170201006GX)。

摘　　要：图像式角位移测量装置中,光栅的安装偏心标定结果直接影响着角位移测量的精度。为此,本文设计了一种用于调试图像式角位移测量装置光栅偏心度的系统。首先,根据图像式角位移测量机理,提出了基于线阵图像传感器的标定光栅偏心度监测原理;然后,在图像传感器上建立了偏心调试监测信号的模型,并提出存在偏心时偏心监测信号的变化机理;最后,对某型号角位移测量装置进行了实验,并给出了调试建议。实验表明,经过调节误差均方差由1017″降低到12.8″。本文设计的偏心监测系统能够实现对标定光栅的高精度安装调试,提高了图像式角位移测量装置的批量生产效率。In an image-based angular displacement measuring device,the installation eccentricity of the calibration grating directly affects the accuracy of angular displacement measurements.In this paper,a system for debugging the eccentricity of the grating in the angular displacement measuring device was designed.First,according to the mechanism of image-based angular displacement measurement,a method for monitoring the eccentricity of the calibration grating was proposed utilizing a linear array image sensor.A model of the eccentricity monitoring signal on the image sensor was subsequently established,and a mechanism for changing the signal was determined.Finally,an experiment on a certain type of angular displacement measurement device was carried out and debugging suggestions were provided.The experiment demonstrates that the adjustment reduces the root mean square error from 1017″to 12.8″.The eccentricity monitoring system designed in this paper can achieve installation and debugging of the calibration grating with high precision,and improve the efficiency of mass production of image-based angular displacement measurement devices.

关 键 词：角位移测量 标定光栅调试 偏心误差 监测系统 

分 类 号：TP212.12[自动化与计算机技术—检测技术与自动化装置]