原子分辨率短程化学力提取与势能谱解算  

Extraction of short-range chemical force in atomic resolution and the spectrum solution of potential energy

作　　者：魏久焱 马宗敏[1,2] 温焕飞 常诞 曲章 许军 金晨 武兴盛 WEI Jiu-yan;MA Zong-min;WEN Huan-fei;CHANG Dan;QU Zhang;XU Jun;JIN Chen;WU Xing-sheng(Science and Technology on Electronic Test and Measurement Laboratory,North University of China,Taiyuan Shanxi 030051;School of Instruments and Electronics,North University of China,Taiyuan Shanxi 030051,China)

机构地区：[1]中北大学电子测试技术重点实验室,山西太原030051 [2]中北大学仪器与电子学院,山西太原030051

出　　处：《电子显微学报》2020年第2期122-127,共6页Journal of Chinese Electron Microscopy Society

基　　金：科技部国家重点研发计划项目(2018YFF01012502);国家自然科学基金资助项目(Nos.51727808,51635011,61874100,61503346);山西省重点研发计划项目(Nos.201701D121080,201803D421037);山西“1331工程”重点学科建设(No.1331KSC)。

摘　　要：超高真空非接触式原子力显微镜近年来飞速发展,在表面物理探测领域有着广泛的应用。其中短程化学力的定量测量对剖析物质特性及反应机理方面有着重要意义,是实现显微镜原子分辨率的关键要素。为精确测量短程化学力,基于球锥探针模型从理论上推导了频率偏移(Δf)与原子间总作用力(F(ts))的转换关系,并分析作用力成分推导短程力求解算法。实验中,频率偏移谱由汉明窗滤波后根据Δf-F(ts)方程解算得到总力谱(F(ts)-z),对其拟合并剔除长程力以精确求解短程力谱(F(short)-z),并积分得到势能谱。本文以Si(111)-(7×7)表面为实验研究对象验证算法可行性。Ultra-high vacuum noncontact atomic force microscopy(NC-AFM)has been developed rapidly in recent years and has been used widely in surface physics.The quantification of short-range chemical forces,which are key elements for achieving atomic resolution of NC-AFM,has great significance in the analysis of material properties and reaction mechanism.In order to measure the short-range chemical forces accurately,the equation of frequency offset(Δf)and total forces(Fts)is theoretically derived based on the spherical-cone probe model,and the calculation algorithm of short-range forces is deduced by analyzing the force components.In our experiment,the frequency offset spectrum,which is filtered by hamming window,is converted into the total force spectrum according to the equation ofΔf and Fts.Besides,the short-range force spectrum(Fshort-z)is obtained by fitting and eliminating the long-range force and integrating it to obtain the potential energy spectrum.In this paper,the Si(111)-(7×7)surface has used as the experimental object to verify the feasibility of the algorithm.

关 键 词：原子力显微镜 力谱 长程力 短程力 原子间作用力 Si(111)-(7×7) 

分 类 号：TG115.215.9[金属学及工艺—物理冶金] TH73[金属学及工艺—金属学]